Imprint Lithography Template Positioning and Leveling
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Solution Overview
Problem
In nano-fabrication processes, particularly in imprint lithography, there is a challenge in maintaining precise alignment and leveling between templates and substrates to prevent image placement errors, uneven fluid spreading, and fluid extrusion beyond desired zones, which affects the accuracy and quality of pattern formation on substrates.
Innovation Solution
The method involves determining position points on adjacent and active regions of two imprint lithography templates, identifying planes based on these points, and adjusting their relative position to compensate for leveling errors, using a system with sensing devices and an actuator system to ensure precise alignment and minimize errors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If templates are held in fixed positions during imprint lithography, then the process is simple and quick, but image placement errors occur and fluid spreads unevenly
Solution Approach 1:
The system performs preliminary leveling measurements using sensing devices to determine position points on template surfaces before the actual imprint lithography process. This advance preparation allows the actuator system to adjust template positions and orientations to predetermined levels, ensuring accurate image placement and uniform fluid distribution during the subsequent imaging operation.
Solution Approach 2:
The system employs sensing devices to detect the actual positions and orientations of templates, then feeds this information back to the actuator system. The actuator system uses this feedback to make real-time adjustments to template positions and orientations, compensating for deviations and maintaining precise alignment throughout the imprint lithography process.
2Manufacturing precision
If template positions are not adjusted, then the process is fast and simple, but fluid extrusion occurs beyond desired zones
Solution Approach 1:
The system performs preliminary leveling measurements and adjustments before fluid dispensing to ensure templates are at predetermined levels. This advance preparation prevents fluid extrusion beyond desired zones during the imprint process while minimizing the time penalty by performing measurements and adjustments efficiently before the actual imaging operation.
3Measurement precision
If sensing devices measure template surfaces, then alignment precision improves, but the process complexity increases
Solution Approach 1:
The sensing devices are designed to perform multiple functions: measuring position points on template surfaces, determining template orientations, and providing data for leveling calculations. The actuator system similarly performs multiple functions including adjusting template positions, orientations, and levels. This multi-functionality reduces the need for separate specialized devices, thereby limiting the increase in overall system complexity.
Data Source
AI summary
Methods, systems, and apparatus for adjusting a relative position of templates including determining a first plurality of position points of a surface of a region adjacent to an active region of a first template, the surface of the adjacent region and a surface of the active region forming a continuous surface of the first template; identifying a plane of the surface of the adjacent region of the first template based on the first plurality of position points; determining a second plurality of position points of a surface of an active region of a second template, the active region of the second template protruding from a surface of the second template; identifying a plane of the surface of the active region of the second template based on the second plurality of position points; and adjusting a relative position of the first template and the second template based on the identified planes.