Semiconductor Template Structure for Replaceable Resin Pattern Layers
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Solution Overview
Problem
Existing templates used in semiconductor manufacturing face challenges in repeatedly reproducing worn-out patterns due to difficulty in peeling off the resin layer with a protective layer from the quartz substrate, and alignment marks can interfere with fine alignment, complicating the process.
Innovation Solution
The template includes a resin layer bonded to a quartz substrate with anchor patterns and protective layers, allowing easy replacement of the resin layer and preventing interference with alignment marks, while the metal layer is positioned on the quartz substrate to facilitate alignment and reduce wear.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a protective layer is formed on the resin layer to enhance durability and prevent wear, then the protective capability is improved, but the ease of peeling off the resin layer deteriorates
Solution Approach 1:
The template structure is segmented into distinct functional layers: a quartz substrate, a resin layer with the pattern, and a protective layer. This segmentation allows the protective layer to be optimized for durability while the resin layer remains replaceable. The anchor patterns further segment the bonding interface, enabling controlled peeling of the resin layer while preserving the protective layer on the substrate.
Solution Approach 2:
Different regions of the template have different properties optimized for their specific functions. The protective layer provides enhanced durability and wear resistance where needed, while the resin layer maintains its replaceable nature for pattern reproduction. The anchor patterns create localized bonding zones that facilitate controlled peeling without compromising overall structural integrity.
2Measurement precision
If alignment marks are provided on the resin layer to facilitate alignment, then the alignment capability is improved, but the interference with fine alignment deteriorates
Solution Approach 1:
The alignment mark is relocated from the resin layer to the quartz substrate, changing its dimensional position. This allows the alignment mark to serve its function while being positioned in a plane that does not interfere with the fine alignment process between the template and substrate. The anchor patterns provide a separate reference system for precise positioning.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the adhesive strength and durability of the resin layer, enabling efficient pattern transfer and alignment without interference, suitable for high-mix low-volume semiconductor manufacturing.
Implementation Method 1
an adhesive layer that is interposed between the mesa portion and the resin layer
Data Source
AI summary
A template according to an embodiment includes a substrate, and a resin layer that is bonded to the substrate and has a pattern on a first surface opposite surface to a second surface facing a substrate, in which the resin layer and the substrate have opposed surfaces including a recess and a protrusion that are configured to be fitted to each other.