Template Transfer Body Collision Avoidance in Imprint Lithography
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Solution Overview
Problem
In nano-fabrication, particularly in imprint lithography, there is a challenge in safely transferring templates between a motion stage and a docking system without collisions, which can lead to misalignment and damage to the templates or substrates.
Innovation Solution
The system employs a docking plate and a motion stage with a defined range of motion, where the periphery of the motion stage is spaced a greater distance from the docking plate than the body, minimizing the probability of collision by creating a gap between the motion stage and the template transfer system during transfer, and using a coupling mechanism with optical detection and latching systems for precise alignment and secure transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the motion stage is positioned close to the docking plate for efficient transfer, then transfer speed and productivity improve, but the risk of collision between the motion stage and docking plate increases
Solution Approach 1:
The patent introduces a template transfer system as an intermediary component between the motion stage and docking plate. This transfer system includes a transfer body that can be coupled to both the motion stage and docking plate, facilitating template transfer without requiring direct contact between the motion stage and docking plate, thereby eliminating collision risk while maintaining transfer efficiency
Solution Approach 2:
The system divides the transfer function into separate components: the motion stage for positioning, the template transfer system for actual transfer operations, and the docking plate for storage. This segmentation allows each component to operate independently within its own spatial zone, preventing collisions while maintaining high productivity
2Productivity
If the template transfer system operates at high velocity for improved productivity, then transfer efficiency increases, but kinetic energy increases leading to potential structural compromise upon collision
Solution Approach 1:
The patent employs a coupling mechanism with detection and control systems that monitor the position and state of the template transfer system. Before transfer operations commence, the system ensures proper alignment and positioning, and includes mechanisms to detect and prevent collisions, thereby cushioning against potential structural damage even during high-velocity operations
3Adaptability or versatility
If the motion stage has a large range of motion for versatile positioning, then positioning flexibility improves, but the distance to the docking plate increases creating larger gaps during transfer
Solution Approach 1:
The template transfer system acts as a mediator that can operate with larger gaps between the motion stage and docking plate. It includes detection systems that can identify templates across larger distances and mechanisms to bridge the gap, maintaining positioning flexibility while accommodating larger working distances
Data Source
AI summary
The present is directed towards an imprint lithography system including, inter alia, a docking plate; a motion stage having a range of motion associated therewith, the range of motion having a periphery spaced-apart from the docking plate a first distance; and a body, having first and second opposed sides spaced-apart a second distance, selectively coupled between the docking plate and the motion stage, the first distance being greater than the second distance to minimize a probability of a collision between the docking plate, the motion stage and the body while transferring the body between the docking plate and the motion stage.