Tension Mask Frame Pre-Deformation for OLED Deposition Accuracy
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Solution Overview
Problem
The deformation of tension mask-frames during vertical vacuum deposition due to gravity and tension leads to pattern errors in OLED manufacturing, particularly as the size of the glass substrate increases, causing adhesion issues between the glass and the mask.
Innovation Solution
An apparatus and method for manufacturing a tension mask-frame assembly, where a tension mask is mounted on a frame with support and connection frames, and a pressing unit pre-deforms the frame to minimize weight and tension deformations, using inward and outward pressing members controlled by a unit to adjust for deformation directions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the size of the glass substrate is increased for mass production, then productivity is improved, but the frame deformation due to gravity increases causing pattern errors
Solution Approach 1:
The frame is pre-deformed in the horizontal position before vertical deposition to compensate for the gravitational deformation that will occur during vertical deposition. This preliminary action ensures that when the frame is rotated to vertical position, the pre-applied deformation counteracts the gravity-induced deformation, maintaining pattern accuracy throughout the deposition process
2Area of stationary object
If the frame size is increased to accommodate larger glass substrates, then the deposition area is improved, but adhesion between glass and mask deteriorates due to sagging
Solution Approach 1:
The frame is pre-deformed in the horizontal position before vertical deposition to compensate for the gravitational deformation that will occur during vertical deposition. This preliminary action ensures that when the frame is rotated to vertical position, the pre-applied deformation counteracts the gravity-induced deformation, maintaining pattern accuracy throughout the deposition process
Solution Approach 2:
The pressing unit applies counteracting forces to the frame to compensate for the sagging effect of gravity. By applying pressure in opposite directions through inward and outward pressing members, the system creates a counterbalancing effect that prevents the mask from sagging during vertical deposition, maintaining proper adhesion between the glass substrate and mask
3Manufacturing precision
If a pressing unit is added to pre-deform the frame, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The pressing unit is divided into multiple independent pressing members that can apply force at different locations and in different directions on the frame. This segmentation allows precise control of deformation at specific areas while keeping each individual pressing member relatively simple in structure, balancing manufacturing precision with device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach minimizes frame deformation during vertical vacuum deposition, reducing pattern formation errors and ensuring accurate deposition by pre-deforming the frame based on predicted deformation amounts.
Implementation Method 1
a pressing unit configured to press the support frame between both ends thereof in a plate surface direction of the support frame; and a control unit configured to control the pressing unit to pre-deform the support frame in accordance with at least a portion of a bending deformation amount of the support frame, caused by own weight of the support frame and tension of the tension mask
Implementation Method 2
bending deformation amount of the support frame, caused by own weight of the support frame and tension of the tension mask
Implementation Method 3
deformation of a frame, caused by the load of the frame and tension of a tension mask during welding
Data Source
AI summary
An apparatus for manufacturing a tension mask-frame assembly includes a frame loading unit configured to load a tension mask-frame assembly, a pressing unit configured to press the support frame, a load cell configured to measure a force applied to the support frame, and a control unit configured to control the pressing unit to pre-deform the support frame in accordance with at least a portion of a bending deformation amount of the support frame, caused by own weight of the support frame and tension of the tension mask. The pressing unit includes inward pressing members which press the pair of support frames toward the inside of the frame, and outward pressing members which press the support frame toward the outside of the frame. The outward pressing members are disposed in a slot formed in a lengthwise direction of the support frame.