Lithography Stop Element Mounting With Tensioned Wire Webs
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Solution Overview
Problem
Existing optical systems face challenges in stabilizing obscuration stops against tilting and facilitating precise adjustment and interchangeability of components like stop elements due to limitations in holder stiffness and integral connections.
Innovation Solution
The optical system employs a releasable connection of components, such as stop elements, to wire-shaped webs, using clamping or plug connections, and incorporates pretensioned springs and length-setting devices to maintain web tension, allowing for precise positioning and easy adjustment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If thin wire-shaped webs are used to hold the obscuration stop, then the beam path is not shaded and imaging quality is maintained, but the holder elements lack sufficient stiffness to stabilize the obscuration stop against tilting
Solution Approach 1:
The patent uses thin wire-shaped webs (flexible holder elements) to suspend the obscuration stop. These thin webs are sufficient to maintain beam path quality by minimizing shading, yet through their flexible nature and strategic arrangement, they provide adequate stiffness to stabilize the stop against tilting while allowing thermal expansion decoupling.
2Strength
If the obscuration stop is held by integral connections to the holder, then the structural connection is strong, but the component cannot be easily adjusted or interchanged
Solution Approach 1:
The patent divides the connection system into separate components: the obscuration stop is held by multiple independent wire-shaped webs rather than a single integral connection. This segmentation allows the stop to be easily adjusted or interchanged by manipulating individual webs, while maintaining strong overall connection through the distributed web structure.
3Illumination intensity
If the webs are made very thin to minimize shading, then the imaging quality is preserved, but the webs cannot provide sufficient mechanical support
Solution Approach 1:
The patent transitions from a single-point attachment to a distributed multi-point attachment system using multiple wire-shaped webs. This dimensional change from point-to-surface distribution allows each individual web to remain extremely thin (minimizing shading) while the collective arrangement of multiple webs provides sufficient mechanical support and stiffness to stabilize the obscuration stop.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances the stability and adjustability of stop elements, ensuring precise alignment and simplifying component interchange, while maintaining tension even with thermal changes.
Implementation Method 1
at least one spring, for example in the form of a leaf spring, arranged between one of the webs and the holder. The spring makes it possible to apply pretension to a respective web
Implementation Method 2
The component, for example in the form of a stop element, in the optical system according to the disclosure is releasably connected to the webs. The releasable connection may be, for example, a clamping connection or a plug connection
Data Source
AI summary
An optical system, such as a lithography system, comprises: a plate-shaped component, such as a stop element; an optionally frame-shaped holder for holding the component; and a plurality of webs for connecting the plate-shaped component to the holder. The plate-shaped component is releasably connected to the preferably wire-shaped webs. The plate-shaped component is attached to a carrying structure. The webs are releasably connected to the carrying structure.