Terahertz Composite Layer Inspection for Opaque Defect Detection
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Solution Overview
Problem
Existing non-destructive measurement techniques for composite structures, such as silicon photonics, are limited by the inability to penetrate non-transparent materials, leading to challenges in assessing electrical and structural characteristics, and current methods like electron microscopy are destructive.
Innovation Solution
Employing terahertz electromagnetic waves to generate, detect, and analyze characteristic signals for non-contact and non-destructive detection of composite structures, allowing assessment of optical and electrical properties, layer thickness, and structural defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If visible light is used for optical measurement, then measurement is possible for transparent materials, but measurement becomes impossible for non-transparent materials
Solution Approach 1:
The patent changes the fundamental parameter of the electromagnetic wave from visible light to terahertz waves. This parameter change enables the detection system to penetrate non-transparent materials while maintaining measurement precision, thereby resolving the contradiction between measurement capability and material applicability
Solution Approach 2:
The patent introduces terahertz waves as an intermediary medium between the detection system and the composite structure. This intermediary enables non-contact detection through opaque materials by exploiting the unique penetration properties of terahertz radiation, thus expanding material applicability without sacrificing measurement precision
2Measurement precision
If electron microscopy is used for inspection, then structural defects can be detected, but the inspection process becomes destructive
Solution Approach 1:
The patent replaces the mechanical/electronic imaging system of electron microscopy with an electromagnetic wave-based detection system using terahertz waves. This substitution eliminates the destructive nature of electron microscopy while maintaining defect detection precision through non-contact, non-destructive electromagnetic radiation
Solution Approach 2:
The patent uses terahertz electromagnetic waves as an intermediary to detect structural defects without direct contact or damage to the specimen. This intermediary approach allows high-precision defect detection while completely avoiding the harmful effects associated with electron beam exposure
3Loss of information
If multiple separate inspection procedures are used to assess electrical and structural characteristics, then comprehensive evaluation is achieved, but the inspection process becomes complex and time-consuming
Solution Approach 1:
The patent creates a universal detection system using terahertz waves that can simultaneously perform multiple inspection functions - assessing both electrical characteristics (through conductivity measurements) and structural characteristics (through imaging and thickness measurements). This multi-functional approach eliminates the need for multiple separate inspection procedures, reducing complexity while maintaining comprehensive evaluation capability
Solution Approach 2:
The patent merges electrical characterization and structural imaging into a single integrated terahertz detection process. By combining these previously separate inspection procedures into one unified system, the patent reduces inspection complexity and time while preserving complete evaluation of both electrical and structural properties
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables non-destructive, non-contact testing of opaque composite structures, maintaining their integrity while identifying defects and ensuring adherence to design specifications.
Implementation Method 1
generating a terahertz emission electromagnetic wave incident on a composite structure
Implementation Method 2
detecting a plurality of terahertz reception electromagnetic waves reflected, transmitted, or scattered after the terahertz emission electromagnetic wave is incident on the plurality of interface layers
Implementation Method 3
detecting a plurality of terahertz reception electromagnetic waves reflected, transmitted, or scattered
Implementation Method 4
detecting a plurality of terahertz reception electromagnetic waves reflected, transmitted, or scattered
Data Source
AI summary
A composite structure detecting method includes generating a terahertz emission electromagnetic wave incident on a composite structure, wherein the composite structure comprises a plurality of interface layers; detecting a plurality of terahertz reception electromagnetic waves reflected, transmitted, or scattered after the terahertz emission electromagnetic wave is incident on the plurality of interface layers of the composite structure; measuring a plurality of characteristic signals based on the terahertz emission electromagnetic wave and the plurality of terahertz reception electromagnetic waves; and analyzing the plurality of characteristic signals to determine a plurality of characteristics of the plurality of interface layers.


