Terahertz Specimen Inspection via Dynamic Path Segmentation
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Solution Overview
Problem
Current terahertz wave imaging technologies face limitations in resolution and imaging speed, hindering their practical application in industries such as semiconductors, where non-destructive inspection is required for high-density and miniaturized components.
Innovation Solution
A specimen inspection apparatus and method utilizing terahertz waves, which includes an emission unit, reflection unit, focus adjusting unit, and control unit to form multiple irradiation regions on a specimen by changing the path of terahertz waves and detecting defects based on reflectivity differences, allowing for high-resolution detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If current terahertz wave imaging technology is used, then non-destructive inspection can be performed, but resolution and imaging speed are limited
Solution Approach 1:
The patent divides the inspection process into multiple discrete irradiation regions on the specimen. By segmenting the imaging area and inspecting each region separately with controlled terahertz wave paths, the system achieves higher resolution without sacrificing overall imaging speed, as multiple regions can be processed in sequence or parallel depending on the configuration
Solution Approach 2:
The patent employs dynamic adjustment of the terahertz wave path using movable reflection units or adjustable focus lenses. This dynamic capability allows the system to optimize the irradiation pattern for each specific inspection region, improving resolution adaptively while maintaining efficient imaging throughput through rapid reconfiguration
2Object-affected harmful factors
If terahertz waves are used for inspection, then harmful effects are reduced compared to X-rays, but imaging resolution is insufficient for high-density components
Solution Approach 1:
The patent changes key parameters of the terahertz wave system including frequency, focal distance, and beam path angles to optimize resolution. By adjusting these parameters dynamically, the system maximizes the resolving power of terahertz waves for high-density semiconductor components while preserving the inherent safety advantage of non-ionizing radiation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the detection of defective regions on specimens with high resolution by forming appropriate diameter regions, improving the accuracy and efficiency of non-destructive inspection in industrial applications.
Implementation Method 1
an emission unit configured to emit terahertz waves
Implementation Method 2
a reflection unit configured to change a path of the terahertz waves emitted from the emission unit
Implementation Method 3
a focus adjusting unit configured to form a first region on a specimen along the path of the terahertz waves
Implementation Method 4
a reception unit configured to receive the terahertz waves, which are irradiated onto the first region and respectively reflected from the specimen
Data Source
AI summary
According to an embodiment of a specimen inspection apparatus, the specimen inspection apparatus may comprise: a radiation unit; a reflection unit; a focus adjusting unit; a reception unit; and a control unit. The specimen inspection apparatus may comprise: a radiation unit for emitting a terahertz wave; a reflection unit for changing the path of a terahertz wave emitted from the radiation unit; a focus adjusting unit for forming an irradiation region on a specimen according to the path of the terahertz wave; a reception unit for receiving individual terahertz waves obtained by reflection, by the specimen, of the terahertz wave irradiated onto the first region; and a control unit for controlling the distance between at least two elements among the plurality of elements, and detecting whether the specimen is defective, according to the reflectivity difference between the terahertz waves.