Terahertz Layered Detection for Non-Destructive Defect Analysis
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Solution Overview
Problem
Existing methods for detecting the internal properties and defects of non-transparent solid materials, such as semiconductor wafers, ceramics, and polymers, are destructive, expensive, time-consuming, or limited in resolution, especially when testing low-light scattering or opaque materials.
Innovation Solution
A layered detection method using terahertz electromagnetic waves to generate and emit waves at various angles, analyzing reflected or transmitted signals to distinguish and analyze the material into multiple layers, determining characteristics and defects non-destructively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional inspection methods (SEM, TEM, XRD) are used to detect internal defects, then detection capability is improved, but cost and time consumption increase significantly
Solution Approach 1:
The patent replaces complex mechanical and chemical preparation processes of traditional methods with terahertz electromagnetic wave detection. The terahertz system directly penetrates and detects internal defects without requiring sample preparation, mechanical sectioning, or complex instrumentation, thereby achieving high-precision internal defect detection while dramatically reducing inspection time and cost.
2Length of stationary object
If OCT, TIRFM, or SAM methods are used to detect subsurface defects, then detection depth is improved, but resolution deteriorates for opaque or low-light scattering materials
Solution Approach 1:
The patent changes the detection parameter from visible or near-infrared light to terahertz electromagnetic waves, which have different interaction characteristics with materials. Terahertz waves can penetrate opaque and low-light scattering materials that block visible light, maintaining both detection depth and resolution by operating in a different electromagnetic spectrum range where the materials are more transparent.
3Measurement precision
If mechanical testing methods are used to measure physical properties, then measurement accuracy is improved, but the sample is damaged
Solution Approach 1:
The patent replaces mechanical testing methods that apply physical force to the sample with terahertz electromagnetic wave detection. The terahertz waves interact with the material's electromagnetic properties (dielectric constant, conductivity) without mechanical contact, enabling accurate measurement of physical properties while completely avoiding sample damage, deformation, or structural changes.
4Measurement precision
If high temperature or voltage is applied to measure thermal or electrical properties, then measurement capability is improved, but sample integrity deteriorates
Solution Approach 1:
The patent replaces extreme environmental testing (high temperature, high voltage) with terahertz electromagnetic wave measurement. The terahertz waves probe the material's intrinsic electromagnetic and thermal properties through non-contact, non-destructive interaction, eliminating the need to subject the sample to conditions that could alter its composition or structure, thereby maintaining sample integrity while achieving accurate property measurement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables non-contact, non-destructive detection of internal properties and defects, improving resolution and accuracy by layering the material to assess parameters like refractive index, conductivity, and structural integrity.
Implementation Method 1
generating a terahertz emission electromagnetic wave, and emitting the terahertz emission electromagnetic wave at any angle to a solid material
Implementation Method 2
detecting a plurality of terahertz emission electromagnetic waves reflected or transmitted after the terahertz emission electromagnetic wave is incident on the solid material
Implementation Method 3
detecting a plurality of terahertz emission electromagnetic waves reflected or transmitted after the terahertz emission electromagnetic wave is incident on the solid material and passes through an entire thickness of the solid material
Data Source
AI summary
A layered detection method comprises generating a terahertz emission electromagnetic wave, and emitting the terahertz emission electromagnetic wave at any angle to a solid material; detecting a plurality of terahertz emission electromagnetic waves reflected or transmitted after the terahertz emission electromagnetic wave is incident on the solid material and passes through an entire thickness of the solid material in a first direction; measuring and analyzing a plurality of characteristic signals according to the terahertz emission electromagnetic wave and the plurality of terahertz reception electromagnetic waves, to distinguish the solid material along the first direction into a plurality of parallel layers, and determine a plurality of characteristics of the plurality of layers; and determining at least one defect information of each layer of the plurality of layers according to the plurality of characteristics of the plurality of layers.