Terahertz Optical Element Cycloolefin Antireflection Film Adhesion

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Solution Overview

Problem

Existing optical elements for terahertz waves using epoxy-based polymers as antireflection films face issues with wave absorption and poor adhesion to silicon surfaces, leading to suboptimal transmittance and reliability.

Innovation Solution

An optical element with an antireflection film composed of a cycloolefin-based polymer and inorganic particles, bonded to a silicon surface using a thermally denatured olefin-based polymer adhesive layer, which enhances adhesion and maintains high transmittance while preventing wave absorption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If an epoxy-based polymer is used as the main component of the antireflection film, then the antireflection film adheres well to the silicon substrate, but the polymer absorbs terahertz waves, reducing transmittance

Engineering Contradiction:
ImproveadhesionVSAvoidwave absorption
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent changes the material parameter from epoxy-based polymer to cycloolefin-based polymer, which fundamentally alters the interaction with terahertz waves. The cycloolefin-based polymer has different molecular structure and electromagnetic properties that result in reduced wave absorption while maintaining appropriate adhesion characteristics when combined with the thermally denatured olefin-based polymer adhesive layer.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent creates a composite structure consisting of three components: cycloolefin-based polymer (antireflection function), thermally denatured olefin-based polymer (adhesion function), and inorganic particles (refractive index adjustment). This composite approach allows each component to specialize in one function, resolving the contradiction between adhesion and wave absorption.

Inventive Principle:
Principle #40Composite materials

2Loss of energy

If a cycloolefin-based polymer is used as the main component of the antireflection film, then the transmittance with respect to terahertz waves is improved, but the adhesiveness with respect to silicon becomes poorer

Engineering Contradiction:
Improvewave absorptionVSAvoidadhesion
Core Design Contradiction:
Loss of energyVSReliability

Solution Approach 1:

The patent divides the antireflection film into two separate functional layers: the cycloolefin-based polymer layer provides antireflection and high transmittance properties, while the thermally denatured olefin-based polymer layer provides adhesion to the silicon substrate. This segmentation allows each layer to optimize its specific function without compromise.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The thermally denatured olefin-based polymer acts as an intermediary layer between the silicon substrate and the cycloolefin-based polymer antireflection film. This intermediate layer bridges the adhesion gap, enabling the cycloolefin-based polymer to maintain its superior transmittance properties while achieving reliable bonding to the silicon substrate through the mediator's adhesive properties.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If the adhesive layer is made thicker to improve bonding, then adhesion is enhanced, but terahertz wave absorption increases

Engineering Contradiction:
ImproveadhesionVSAvoidwave absorption
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent changes the chemical and physical parameters of the olefin-based polymer through thermal denaturation. This treatment modifies the polymer's molecular structure, surface properties, and adhesive characteristics, enabling strong bonding to silicon at minimal thickness. The thermal denaturation process creates a material that achieves maximum adhesion efficiency with minimum thickness, thereby minimizing wave absorption.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides an optical element with improved transmittance and reliability by ensuring effective bonding of the antireflection film to the silicon surface, reducing wave reflection and absorption, and allowing for adjustable refractive indices to optimize terahertz wave transmission.

Implementation Method 1

the adhesive layer includes a thermally denatured olefin-based polymer

Methodology Applied
Scientific EffectThermal denaturation: Heat Treatment

Implementation Method 2

an antireflection film including an organic resin including a cycloolefin-based polymer as a main component, and inorganic particles dispersed in the organic resin

Methodology Applied
Scientific EffectRefraction: Refraction

Data Source

PatentUS11320569B2Optical element for terahertz waves and manufacturing method of the same
Publication Date: 2022.05.03 HAMAMATSU PHOTONICS KK
  • US11320569B2 patent drawing
  • US11320569B2 patent drawing
  • US11320569B2 patent drawing

AI summary

An optical element for terahertz waves includes: an optical component including a silicon surface, an antireflection film including an organic resin including a cycloolefin-based polymer as a main component, and inorganic particles dispersed in the organic resin; and an adhesive layer located between the optical component and the antireflection film in a thickness direction of the antireflection film and bonding the silicon surface of the optical component and the antireflection film to each other. The adhesive layer includes a thermally denatured olefin-based polymer.