Terahertz Probe Layout Using Plasma Coupling for Wider Inspection Bandwidth
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Solution Overview
Problem
Current terahertz wave inspection methods face limitations in penetrating metal patterns within semiconductor chips and have limited bandwidth due to the radio-wave characteristics of terahertz waves, which restrict their application in semiconductor quality evaluation and non-destructive testing.
Innovation Solution
A broadband terahertz probe is developed, featuring a receiver antenna with overlapping waveguides and electrodes, generating plasma in a gap to couple terahertz band signals with laser beams, allowing for increased bandwidth and non-destructive inspection by sensing the intensity and frequency of the generated second laser beam.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If terahertz waves are used for non-contact inspection, then the inspection process becomes non-destructive and convenient, but the bandwidth is limited due to radio-wave characteristics
Solution Approach 1:
The patent applies parameter changes by utilizing plasma carriers with higher mobility than conventional photoconductive switches, thereby changing the fundamental parameter of carrier mobility to achieve broader bandwidth while maintaining non-contact inspection capabilities
Solution Approach 2:
The patent substitutes the conventional photoconductive switch mechanism with a plasma-based detection mechanism, replacing the limited mobility of photoconductive carriers with the superior mobility of plasma carriers to overcome bandwidth limitations
2Adaptability or versatility
If plasma is generated in the gap to improve carrier mobility, then bandwidth increases, but device complexity increases due to additional waveguides and laser beam requirements
Solution Approach 1:
The patent merges multiple functions into a single integrated probe structure, combining the receiver antenna, waveguides for laser beam introduction and extraction, and plasma generation region into one compact device, thereby reducing overall system complexity despite the advanced functionality
Solution Approach 2:
The probe structure serves multiple functions simultaneously: the receiver antenna receives terahertz waves, the waveguides introduce and extract laser beams, and the gap region generates plasma for carrier multiplication, making the device multi-functional and efficient
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The probe enhances the bandwidth and accuracy of terahertz wave inspection, enabling effective non-destructive testing of semiconductor materials by improving the mobility of plasma carriers and integrating optics for compact, high-speed inspection.
Implementation Method 1
the receiver antenna is configured to generate plasma in the gap and couple the plasma with a terahertz band signal from an inspection object
Implementation Method 2
the first waveguide is configured to introduce a first laser beam with a first frequency into the gap
Implementation Method 3
the second waveguide is configured to transfer a second laser beam with a second frequency, the second laser beam being generated in response to the plasma, the terahertz band signal, and the first laser beam
Data Source
AI summary
An inspection apparatus is provided. The inspection apparatus includes a substrate extending in a first direction and a second direction perpendicular to the first direction, a receiver antenna arranged on the substrate and including first and second antenna electrodes, a first waveguide on the substrate, and a second waveguide on the substrate, wherein the first antenna electrode overlaps the first waveguide in a third direction that is perpendicular to the first direction and the second direction, and the second antenna electrode overlaps the second waveguide in the third direction.