Terahertz Measurement Resolution Control for Faster Accurate Scanning

Solution Overview

Problem

Existing electromagnetic wave measurement devices face a trade-off between spatial resolution and measurement time, with higher resolution leading to longer scanning times and lower resolution resulting in lower accuracy.

Innovation Solution

An electromagnetic wave measurement device that adjusts spatial resolution based on the spatial variation in the internal state and shape of the sample, using terahertz waves to set higher resolution where variations are significant and lower resolution where variations are minimal.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If spatial resolution is increased by using a smaller beam diameter, then measurement accuracy is improved, but scanning time is lengthened

Engineering Contradiction:

Improvemeasurement accuracyVSAvoidscanning time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The patent applies local quality by adjusting the beam diameter according to the spatial variation characteristics of each specific measurement region. In regions with large spatial variation, a smaller beam diameter is used to maintain high measurement accuracy. In regions with small spatial variation, a larger beam diameter is used to reduce scanning time. This regional differentiation resolves the contradiction between measurement accuracy and scanning time by tailoring the beam parameters to local requirements rather than using a uniform approach throughout the entire sample.

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The patent implements dynamics by making the beam diameter adjustable and adaptive during the scanning process. The beam diameter is dynamically changed based on the recognized spatial variation in the sample's internal state or shape at each measurement position. This dynamic adjustment allows the system to optimize between measurement accuracy and scanning time in real-time, transforming a static measurement system into one that can adapt its parameters based on the sample characteristics at each location.

Inventive Principle:

Principle #15Dynamics

2Productivity

If spatial resolution is decreased by using a larger beam diameter, then scanning time is shortened, but measurement accuracy becomes lower

Engineering Contradiction:

Improvescanning speedVSAvoidmeasurement accuracy

Core Design Contradiction:

ProductivityVSMeasurement precision

Solution Approach 1:

The patent applies local quality by adjusting the beam diameter according to the spatial variation characteristics of each specific measurement region. In regions with large spatial variation, a smaller beam diameter is used to maintain high measurement accuracy. In regions with small spatial variation, a larger beam diameter is used to reduce scanning time. This regional differentiation resolves the contradiction between measurement accuracy and scanning time by tailoring the beam parameters to local requirements rather than using a uniform approach throughout the entire sample.

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The patent implements dynamics by making the beam diameter adjustable and adaptive during the scanning process. The beam diameter is dynamically changed based on the recognized spatial variation in the sample's internal state or shape at each measurement position. This dynamic adjustment allows the system to optimize between measurement accuracy and scanning time in real-time, transforming a static measurement system into one that can adapt its parameters based on the sample characteristics at each location.

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables setting appropriate spatial resolution for each irradiation portion, balancing measurement accuracy and time efficiency by dynamically adjusting beam size according to the sample's internal state and shape.

Implementation Method 1

an electromagnetic wave irradiation unit that irradiates a sample with an electromagnetic wave

Methodology Applied

Scientific EffectElectromagnetic radiation: Electromagnetic Induction

Implementation Method 2

an electromagnetic wave detection unit that detects the electromagnetic wave from the sample

Methodology Applied

Scientific EffectElectromagnetic wave detection: Electromagnetic Induction

Data Source

PatentEP4679061A1Electromagnetic wave measurement device, electromagnetic wave measurement method, and electromagnetic wave measurement program

Publication Date: 2026.01.14 SUMITOMO HEAVY IND LTD

Figure 1
Figure 2
Figure 3A~3B

AI summary

An electromagnetic wave measurement device 1 includes electromagnetic wave irradiation units 21 and/or 31 that irradiate a sample S with an electromagnetic wave such as a terahertz wave, electromagnetic wave detection units 22 and/or 32 that detect the electromagnetic wave such as the terahertz wave from the sample S, recognition units 51 and/or 52 that recognize a spatial variation in an internal state and/or a shape of the sample S, based on the electromagnetic wave such as the terahertz wave detected by the electromagnetic wave detection units 22 and/or 32, and a spatial resolution determination unit 53 that determines a spatial resolution of the electromagnetic wave such as the terahertz wave for irradiating each portion of an object of the same type as the sample S, in accordance with the spatial variation in the internal state and/or the shape.