Terahertz Wave Non-Contact Sheet Resistance Analysis
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Solution Overview
Problem
Current non-contact sheet resistance measurement methods using electromagnetic waves have low accuracy and struggle to detect damage in transparent electrodes and electronic devices, particularly for large-scale samples, and fail to provide reliable uniformity evaluations.
Innovation Solution
An apparatus and method utilizing terahertz waves to radiate and receive waves from samples with conductive material layers, analyzing sheet resistance, coverage density, component analysis, and thickness through equations and a database, displaying results as images for accurate characterization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If four-point probe contact measurement is used, then resistance measurement can be performed, but the sample is damaged by the probes
Solution Approach 1:
The patent replaces the mechanical contact measurement system (four-point probe) with an electromagnetic wave-based non-contact measurement system. The electromagnetic waves interact with the conductive material layer to measure sheet resistance without physical contact, thereby eliminating probe-induced sample damage while maintaining measurement capability.
Solution Approach 2:
The patent introduces electromagnetic waves as an intermediary medium to transfer measurement information from the sample to the detector without direct mechanical contact. The waves serve as a mediator that carries electrical resistance information while avoiding the harmful mechanical interaction that causes sample damage.
2Object-affected harmful factors
If non-contact electromagnetic wave measurement is used, then sample damage is avoided, but measurement accuracy is reduced
Solution Approach 1:
The patent utilizes the unique parameters of terahertz waves (frequency range between microwaves and optical waves) that provide both transmission through polymer substrates and reflection from metal electrodes. By operating in this specific frequency regime, the system achieves non-contact measurement with accuracy sufficient for evaluating sheet resistance and detecting electrode damage.
Solution Approach 2:
The measurement system employs periodic electromagnetic wave radiation and detection cycles, using pulsed or modulated terahertz waves to interrogate the sample. This periodic action allows for precise timing and signal processing, improving measurement accuracy while maintaining non-contact operation.
3Ease of operation
If non-contact electromagnetic wave measurement is used, then measurement can be performed without contact, but the ability to recognize transparent electrode position and damage is reduced
Solution Approach 1:
The patent employs imaging techniques that visualize the reflected or transmitted electromagnetic wave intensity patterns, creating visual representations analogous to color changes. Regions with different sheet resistance values or electrode damage appear as distinct intensity patterns in the captured images, enabling easy recognition of electrode position and damage locations without physical contact.
Solution Approach 2:
The patent replaces manual visual inspection or contact-based positioning methods with electromagnetic wave-based imaging and analysis. The system automatically detects and maps electrode positions and damage areas through non-contact wave interaction, eliminating the need for physical probe positioning while improving detection capability.
4Area of stationary object
If measurement area of large-scale sample is increased, then more comprehensive resistance measurement is achieved, but damaged area increases and measurement accuracy decreases
Solution Approach 1:
The patent divides the large-scale sample measurement into multiple discrete measurement points or regions that can be systematically scanned and evaluated. By segmenting the measurement process and analyzing each region independently through non-contact electromagnetic wave interaction, the system maintains measurement accuracy across the entire large area without the cumulative damage problems of contact methods.
Solution Approach 2:
The patent transitions from point-by-point contact measurement to area-wide non-contact measurement, utilizing the two-dimensional imaging capability of electromagnetic wave detection. This dimensional change allows simultaneous measurement across the entire sample area, comprehensively evaluating resistance uniformity without increasing damaged area.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables non-contact, high-accuracy analysis of sheet resistance and other characteristics, effectively overcoming limitations of existing methods by providing reliable and detailed evaluations of sample properties without physical contact.
Implementation Method 1
receiving unit configured to receive terahertz waves reflected from the sample
Implementation Method 2
receiving unit configured to receive terahertz waves passing through the sample
Implementation Method 3
terahertz waves, when radiated onto an electronic device, pass through a substrate formed of a highly polymerized compound that supports an electrode and are reflected from an electrode formed of a metal
Implementation Method 4
reflected from an electrode formed of a metal
Implementation Method 5
intensity of the reflected waves is reduced or intensity of transmitted terahertz waves is increased
Data Source
AI summary
Disclosed are an apparatus and a method for non-contact sample analysis using terahertz waves. The apparatus includes an emission unit radiating terahertz waves onto a sample provided with a conductive material layer, and a receiving unit receiving terahertz waves reflected from the sample or terahertz waves passing through the sample. The apparatus further includes a characteristic analysis unit including at least one selected from a group consisting of a sheet resistance analysis unit analyzing a sheet resistance of the conductive material layer, a coverage density analysis unit analyzing a coverage density of the conductive material layer, a component analysis unit analyzing a component of the conductive material layer, and a thickness analysis unit analyzing a thickness of the conductive material layer by using the received terahertz waves, a display unit displaying a result derived from the characteristic analysis unit as an image, and an input unit configured to input information to the characteristic analysis unit.