Electrical Terminal Connector With Elastic Fixation for Stable Heating Links
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Solution Overview
Problem
Existing electrical terminal connectors for semiconductor manufacturing are prone to disconnection due to external forces or high temperatures, leading to instability in connecting electrical cables to heating terminals.
Innovation Solution
An electrical terminal connector with a variable terminal connection portion and an elastic member that allows for easy insertion and secure fixation of electrical terminals, using a housing unit and terminal connection unit with a hollow shaft and connecting pipe, ensuring reliable connection even under temperature variations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If electrical cables are directly connected to electrical terminals using conventional connectors, then the connection can be established quickly, but the connection becomes unstable and prone to disconnection due to external force or high temperature
Solution Approach 1:
The terminal connection unit is designed to reciprocate within the housing unit, allowing dynamic movement between insertion and retraction positions. This dynamic structure enables the connector to adapt to thermal expansion and contraction while maintaining stable electrical connection, preventing disconnection under external force or high temperature conditions
Solution Approach 2:
The terminal connection unit is nested within the housing unit, with the terminal connection portion inserted into the housing ring when fixed. This nested configuration provides structural stability and protection while maintaining a compact overall design, balancing connection reliability with device complexity
2Reliability
If the terminal connection portion is firmly fixed to prevent disconnection, then connection reliability improves, but assembly and disassembly time increases
Solution Approach 1:
The terminal connection unit can reciprocate between fixed and movable states. During assembly, it is easily inserted into the housing ring; during maintenance, it can be readily extracted. This dynamic design achieves both firm fixation for reliability and ease of assembly/disassembly, reducing time loss without compromising connection reliability
Solution Approach 2:
The elastic member acts as an intermediary between the terminal connection unit and housing unit, providing automatic engagement force. This intermediary mechanism ensures reliable connection through elastic retention while allowing simple insertive assembly, reducing assembly time without sacrificing connection reliability
3Productivity
If the connector structure is simplified for easier assembly, then assembly time decreases, but connection stability under high temperature and external force deteriorates
Solution Approach 1:
The reciprocating terminal connection unit provides a simple yet effective mechanism that achieves both easy assembly and stable connection. The dynamic insertion and retraction capability allows rapid assembly while the engaged position within the housing ring ensures stability under high temperature and external force, maintaining connection reliability without compromising assembly efficiency
Solution Approach 2:
The elastic member provides self-service by automatically applying retention force to the terminal connection unit when inserted. This self-engaging mechanism simplifies the assembly process (improving productivity) while ensuring stable fixation without additional fastening operations, maintaining connection reliability under demanding conditions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a stable and secure connection between electrical terminals and cables, reducing assembly time and preventing disconnection, while allowing for efficient cooling during high-temperature processes.
Implementation Method 1
an elastic member connecting the housing unit and the hollow shaft and applying elastic force to the hollow shaft so that the terminal connection portion moves back into the housing ring when the terminal connection portion is separated from the housing ring
Data Source
AI summary
An electrical terminal connector, a substrate support, and a substrate processing apparatus are provided. The electrical terminal connector includes a housing unit installed by penetrating through a heater cup and having a housing ring, and a terminal connection unit installed to reciprocate within the housing unit and having a terminal connection portion to or from which an electric terminal is attached and detached. The terminal connection portion is variable so that the electric terminal is insertable when the terminal connection portion is separated from the housing ring and the electric terminal is fixed when the terminal connection portion is inserted into the housing ring together with the inserted electric terminal.