Tertiary Azeotrope Composition for Semiconductor Cleaning
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Solution Overview
Problem
The need for environmentally safe solvents for cleaning applications in semiconductor manufacturing, particularly for removing residual flux, lubricants, and particles, has arisen due to the environmental concerns associated with chlorofluorocarbons (CFCs) and hydrofluorocarbons (HFCs), which contribute to ozone depletion and global warming.
Innovation Solution
A composition comprising trans-1,2-dichloroethylene, a hydrofluoroether, and a hydrofluorocarbon or alkyl perfluoroalkene ether is developed, which forms azeotropic or azeotrope-like mixtures that serve as effective cleaning agents, defluxing agents, and degreasing agents, offering low environmental impact and consistent performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If CFC compounds are used for cleaning applications, then cleaning effectiveness is improved, but environmental harm increases due to ozone depletion
Solution Approach 1:
The patent changes the chemical composition parameters by formulating a tertiary azeotrope containing trans-dichloroethylene (65-95 wt%), a hydrofluoroether (5-30 wt%), and a hydrofluorocarbon or alkyl perfluoroalkene ether (3-20 wt%). This specific compositional parameter change maintains cleaning effectiveness while reducing environmental harm compared to traditional CFCs
Solution Approach 2:
The invention uses a composite solvent system consisting of three different chemical components forming an azeotropic mixture. This composite approach combines the advantages of each component: trans-dichloroethylene provides cleaning power, hydrofluoroethers provide low environmental impact, and hydrofluorocarbons enhance solvency while maintaining azeotropic behavior for consistent performance
2Object-affected harmful factors
If HFC compounds are used to replace CFCs, then ozone depletion is reduced, but global warming contribution increases
Solution Approach 1:
The patent optimizes the concentration parameters of each component to achieve a balance between ozone protection and greenhouse gas reduction. The specific ratio of trans-dichloroethylene (65-95 wt%), hydrofluoroether (5-30 wt%), and hydrofluorocarbon (3-20 wt%) is designed to minimize overall environmental impact while maintaining cleaning effectiveness
Solution Approach 2:
The hydrofluoroether acts as an intermediary component that bridges between the cleaning power of chlorinated compounds and the environmental friendliness of fluorinated compounds. It provides a transition medium that reduces both ozone depletion potential and global warming potential compared to using HFCs alone
3Reliability
If azeotropic compositions are used, then cleaning performance consistency is improved, but formulation complexity increases
Solution Approach 1:
The patent establishes specific parameter ranges for each component to define the azeotropic composition: trans-dichloroethylene (65-95 wt%), hydrofluoroether (5-30 wt%), and hydrofluorocarbon or alkyl perfluoroalkene ether (3-20 wt%). These parameter specifications ensure consistent azeotropic behavior and reliable cleaning performance while providing clear formulation guidelines
Solution Approach 2:
The azeotropic composition serves multiple functions simultaneously: it provides consistent cleaning performance across different applications, maintains stable vapor pressure for controlled evaporation, ensures uniform mixing of components, and delivers reproducible results in semiconductor manufacturing cleaning processes
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed composition effectively removes residues and deposits fluorolubricants on surfaces, providing a sustainable solution for semiconductor manufacturing while minimizing environmental harm and ensuring consistent cleaning performance.
Implementation Method 1
The compositions described herein may be useful, for example, in cleaning and defluxing fluid applications... azeotropic or azeotrope-like mixtures that serve as effective cleaning agents
Implementation Method 2
A process for removing at least a portion of residue from the surface of a substrate comprising contacting the substrate with a composition described herein
Implementation Method 3
A process removing at least a portion of water from the surface of a wetted substrate, comprising contacting the substrate with a composition described herein, and then removing the substrate from contact with the composition
Implementation Method 4
c) evaporating the solvent from the surface to form a fluorolubricant coating on the surface
Data Source
AI summary
The present application provides tertiary azeotrope or azeotrope-like compositions comprising trans-dichloroethylene and two additional components. Methods of using the compositions provided herein in cleaning, defluxing, deposition, and carrier fluid applications are also provided.