Test Apparatus Error Detection via Measured Value Dispersion Analysis

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Solution Overview

Problem

Measurement systems for devices under test often experience variability due to various factors, making it challenging to analyze and manage measurement data effectively, leading to potential errors and misclassification of defective or non-defective products.

Innovation Solution

An analysis apparatus that acquires and analyzes multiple measured values to extract dispersion, separates position-dependent components, and uses machine learning to detect errors in the test apparatus by identifying outliers outside the calculated probability distribution.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If measurement is performed by bringing a jig into contact with the device under measurement, then measurement can be conducted, but measurement system state varies due to various factors making it difficult to manage

Engineering Contradiction:
Improvemeasurement system stabilityVSAvoidmeasurement system management complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent segments the measured value into multiple components: position-dependent component (including concentric, X-axis, and Y-axis components) and dispersion component. This segmentation allows independent analysis of each component, making it easier to manage and monitor measurement system stability without increasing overall system complexity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent implements feedback by continuously monitoring the dispersion component of measured values and using this information to detect errors in the test apparatus. The management unit receives dispersion information and provides feedback to identify and correct measurement system issues, thereby maintaining stability without requiring complex manual management

Inventive Principle:
Principle #23Feedback

2Reliability

If multiple measured values are acquired and analyzed to extract dispersion, then error detection capability is improved, but processing complexity increases

Engineering Contradiction:
Improveerror detection accuracyVSAvoiddata processing complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The analysis unit segments the measured values into position-dependent components and dispersion components. By separating these components, the system can efficiently process and analyze only the dispersion component for error detection, reducing processing complexity while maintaining high error detection accuracy

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent extracts the dispersion component from the measured values through systematic analysis. By taking out and isolating the dispersion component, the system simplifies the data processing task and focuses computational resources only on the essential error detection function, improving reliability without proportionally increasing complexity

Inventive Principle:
Principle #2Taking out (Extraction)

Data Source

PatentUS20210199713A1Analysis apparatus, analysis method, and recording medium having recorded thereon analysis program
Publication Date: 2021.07.01 ADVANTEST CORP
  • US20210199713A1 patent drawing
  • US20210199713A1 patent drawing
  • US20210199713A1 patent drawing

AI summary

In order to analyze information obtained from a measurement system and to manage the measurement system, there is provided an analysis apparatus including: an acquisition unit configured to acquire a plurality of measured values obtained by a test apparatus measuring a device under measurement; an analysis unit configured to analyze the plurality of measured values to extract dispersion of a measured value; and a management unit configured to detect an error in the test apparatus based on the dispersion of the measured value. Further, in order to solve the above problem, there is provided an analysis method. Further, in order to solve the above problem, there is provided a recording medium having recorded thereon an analysis program.