Test Apparatus Fragment Containment for Semiconductor Strength Testing

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Solution Overview

Problem

The existing test apparatus for measuring the strength of specimens, such as semiconductor device chips, poses a challenge as the scattering of fragments during the three-point bending test reduces the operator's visibility, making it difficult to conduct the test effectively.

Innovation Solution

A test apparatus design that includes a lower container, an upper container, a support unit, a pressing unit with an indenter, and a load measurement unit, where the upper container covers the specimen during testing to contain fragments, and a fragment discharge path with a suction source to collect and remove fragments, allowing for safer and clearer observation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the operator wears protective gear like goggles during the strength test, then safety is improved by preventing fragment injury, but visibility is reduced making it difficult to observe the specimen and test components

Engineering Contradiction:
ImprovesafetyVSAvoidvisibility
Core Design Contradiction:
ReliabilityVSIllumination intensity

Solution Approach 1:

The harmful factor (scattered fragments) is extracted and isolated from the testing environment by containing it within the upper container. This allows the operator to work without protective goggles while maintaining safety, thus resolving the contradiction between safety and visibility.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The upper container acts as an intermediary barrier between the specimen/fragments and the operator. It provides protection against fragments while maintaining transparency to allow clear observation, eliminating the need for goggles and resolving the visibility-safety trade-off.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Object-generated harmful factors

If the upper container is used to cover the specimen during testing, then fragment scattering is prevented, but the complexity of the device increases due to additional components

Engineering Contradiction:
Improvefragment scatteringVSAvoiddevice complexity
Core Design Contradiction:
Object-generated harmful factorsVSDevice complexity

Solution Approach 1:

The upper container is designed to nest within the lower container when not in use, and to fit over the specimen area during testing. This space-efficient design minimizes the overall device footprint and reduces structural complexity while effectively containing fragments.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The upper container is designed as a thin-walled structure that provides effective fragment containment with minimal material and structural complexity. The thin-film design allows the container to be lightweight yet sufficiently strong to contain fragments, reducing overall device complexity.

Inventive Principle:
Principle #30Flexible shells and thin films

3Loss of substance

If the fragment discharge path and suction source are added to collect fragments, then cleanliness is improved, but the device complexity and cost increase

Engineering Contradiction:
Improvefragment cleanupVSAvoiddevice complexity
Core Design Contradiction:
Loss of substanceVSDevice complexity

Solution Approach 1:

The fragment discharge system is designed to be activated automatically or easily by the operator after testing. The suction source and discharge path enable self-contained fragment removal without requiring additional manual cleaning steps or complex external systems, providing practical fragment management with minimal added complexity.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Prevents fragment scattering, eliminating the need for protective gear like goggles, thereby enhancing visibility and facilitating the strength testing process by containing fragments within the apparatus.

Implementation Method 1

a fragment discharge path having one end that is coupled to a fragment discharge port formed at a bottom of the lower container and having another end that is coupled to a suction source; and a fragment collector that is provided in the fragment discharge path and collects a fragment of the specimen

Methodology Applied
Scientific EffectSuction: Suction

Data Source

PatentUS11162881B2Test apparatus
Publication Date: 2021.11.02 DISCO CORP
  • US11162881B2 patent drawing
  • US11162881B2 patent drawing
  • US11162881B2 patent drawing

AI summary

A test apparatus for measuring strength of a specimen includes: a lower container having an opening that opens upward; an upper container having an opening that opens downward and being sized to be insertable into the opening of the lower container; a support unit that is provided in the opening of the lower container and supports the specimen; a pressing unit including an indenter that presses the specimen, and a load measurement unit that measures a load applied to the indenter; and a movement mechanism that moves the indenter closer and away relative to the support unit, in which when the specimen supported by the support unit is pressed by the indenter moved by the movement mechanism, the upper container is positioned so as to cover the specimen.