Vacuum Coating Test Glass Changer Centering

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Solution Overview

Problem

Existing test glass changers in vacuum coating systems require manual intervention and precise mechanical adjustments, leading to time-consuming process interruptions, contamination, and imprecise positioning, especially when changing test glasses in the vacuum chamber.

Innovation Solution

A test glass changer with a centering device featuring an actuator element and a bearing element that uses spring force to precisely position the test glass without venting the vacuum chamber, utilizing a hub and spring bolt or leaf spring mechanism for accurate alignment and holding torque, allowing for easy and precise positioning of test glasses in the coating and measurement paths.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If manual test glass change is performed with vacuum chamber open, then test glass can be replaced, but process time increases and particle contamination occurs

Engineering Contradiction:
Improvetest glass replacement capabilityVSAvoidprocess interruption time
Core Design Contradiction:
Adaptability or versatilityVSLoss of time

Solution Approach 1:

The system enables automatic test glass replacement through a robotic mechanism that operates within the vacuum chamber without requiring manual intervention or chamber venting. The robotic arm autonomously picks up spent test glasses and replaces them with fresh ones, allowing the coating process to continue uninterrupted.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The test glass replacement mechanism operates entirely within the maintained vacuum environment, preventing exposure to atmospheric particles. The robotic arm and test glass holders are designed to work in the vacuum chamber without breaking the vacuum seal, thus avoiding particle contamination that would occur with chamber venting.

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

2Measurement precision

If precise mechanical alignment is used for test glass positioning, then positioning accuracy improves, but device complexity and adjustment difficulty increase

Engineering Contradiction:
Improvetest glass positioning accuracyVSAvoidmechanical alignment complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The system replaces complex mechanical alignment mechanisms with a magnetic field-based positioning system. Magnets embedded in the test glass holders interact with corresponding magnetic sensors or actuators to automatically center and position test glasses in the beam path, eliminating the need for precision mechanical adjustments and alignment procedures.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

Magnetic fields serve as an intermediary between the positioning control system and the test glass holders. The magnetic interaction provides precise, contactless positioning and centering of test glasses without requiring direct mechanical contact or complex alignment mechanisms, simplifying the overall system while maintaining high positioning accuracy.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise and efficient positioning of test glasses without the need for complex mechanical adjustments or venting the vacuum chamber, reducing contamination and process interruptions, and ensuring accurate alignment for both transmission and reflection measurements.

Implementation Method 1

a bearing element (11, 35) arranged rigidly at an angle to the axis of rotation (4) and which can be acted upon by the actuator element (13, 26) with spring force

Methodology Applied
Scientific EffectSpring force: Spring

Data Source

PatentEP2751520B1Test glass changing
Publication Date: 2020.04.01 BUHLER ALZENAU GMBH
  • EP2751520B1 patent drawingFigure 1
  • EP2751520B1 patent drawingFigure 2
  • EP2751520B1 patent drawingFigure 3

AI summary

The test glass changer for optical measurement of layer characteristics in vacuum coating systems which have a movable substrate holder (2) for guiding at least one substrate on a path through at least one stream of a coating material, having a holder (6), which is rigidly connected to a rotary axle (4) and which is rotatable relative to the substrate holder (2) about the rotary axle (4), for at least one test glass element and having a control device for the introduction of in each case one test glass element into an optical path of an optical measurement device and into the at least one stream of the coating material, wherein the holder (6) has at least two recesses (7), which are offset eccentrically with respect to the axle (4), for in each case one test glass element, and a rotational movement of the holder (6) about the axle (4) can be effected by means of the control device, is characterized in that a centering device (10) is provided by means of which a torque and a holding moment can be exerted on the holder (6) in order to move a test glass element arranged in one of the recesses (7) into a measurement position of the measurement device. In the method for test glass changing by means of the device, it is provided that, before a test glass element arranged in one of the recesses (7) is moved into a measurement position of the measurement device, a rotational movement of the holder (6) is effected by means of the control device, which rotational movement causes said test glass element to be moved into a first position whose angular distance from the measurement position is smaller than the angular distance between the recesses (7), and said test glass element is subsequently moved into the measurement position by means of the centering device (10).