Test Element Group Layout for Selective Fin Epitaxy
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Solution Overview
Problem
Existing methods for fabricating test element groups in semiconductor devices face challenges in efficiently forming and testing the source/drain structures for integrated circuits, leading to inadequate test reliability.
Innovation Solution
A fabricating method involving selective epitaxial growth is employed, where a masking material is used to cover certain fins, allowing gas injection only on uncovered fins, thereby forming source/drain structures exclusively in a designated test group area, enhancing the efficiency and reliability of the test process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If gas is injected onto all fins in the test area, then the source/drain structures can be formed on all fins, but the test reliability is insufficient because it cannot distinguish between functional and non-functional areas
Solution Approach 1:
The test area is divided into a test group area and a masking area, with only the test group area receiving gas injection for source/drain formation. This segmentation allows selective testing of specific fin regions, improving test reliability by creating distinct functional and non-functional test zones.
Solution Approach 2:
Different regions of the test area are given different properties: the test group area receives epitaxial growth for source/drain formation while the masking area does not. This local differentiation enables reliable distinction between functional and non-functional areas for testing purposes.
2Reliability
If selective epitaxial growth is performed only on a specific area, then the test reliability is improved, but the manufacturing process becomes more complex requiring masking material deposition and removal
Solution Approach 1:
Masking material is deposited on the substrate before gas injection to predefine the test group area. This preliminary action simplifies the subsequent gas injection process by pre-establishing the selective growth regions, making the overall process more controllable despite the additional masking step.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method improves the formation efficiency and reliability of electrical characteristics testing for source/drain structures by concentrating gas injection in a specific area, thereby increasing the effectiveness of the test element group's functionality.
Implementation Method 1
performing selective epitaxial growth by injecting a gas onto the plurality of fins, such that the gas is not injected onto at least some of the plurality of fins covered with the masking material, and such that the epitaxial growth does not occur on the fins covered with the masking material
Data Source
AI summary
A fabricating method for a test element group is provided. The fabricating method for a test element group includes fabricating test areas generated in a scribe lane area, wherein fabricating of the test areas includes forming a plurality of fins protruding in a first direction on a substrate, covering at least some of the plurality of fins with a masking material, and performing selective epitaxial growth by injecting a gas onto the plurality of fins. The gas is not injected onto the at least some of the plurality of fins that are covered with the masking material, such that the epitaxial growth does not occur on the fins covered with the masking material.