In-line Test Handler Spinning Apparatus for Semiconductor Tray Orientation

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Solution Overview

Problem

Existing test handlers face delays in processing semiconductor devices due to sequential operation of loading, testing, and unloading processes, where trays must wait in specific units until processes are completed, and any issues in these units cause the entire system to stop.

Innovation Solution

An in-line test handler with a spinning apparatus that rotates the test tray to maintain consistent device arrangement across different chamber units, allowing for simultaneous processing and minimizing downtime by connecting chamber units and sorting units in-line with a conveyor system.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If the test tray is transferred sequentially through loading unit, testing unit, and unloading unit, then the process structure is simple, but the working time is delayed due to waiting periods

Engineering Contradiction:
Improveprocess structureVSAvoidworking time
Core Design Contradiction:
Device complexityVSLoss of time

Solution Approach 1:

The test handler is divided into multiple independent chamber units (first chamber unit, second chamber unit, third chamber unit) that can operate simultaneously. Each chamber unit is a separate module that performs loading, testing, or unloading operations independently, allowing parallel processing of multiple test trays without sequential waiting.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The test tray is designed with rotatable positioning that allows dynamic adjustment of device orientations. The tray can rotate to present different devices to different chamber units in various orientations, enabling flexible routing and simultaneous processing while maintaining proper device alignment for testing.

Inventive Principle:
Principle #15Dynamics

2Device complexity

If the test tray waits in the loading unit until testing is completed, then the loading unit structure is simple, but the loading process time is delayed

Engineering Contradiction:
Improveloading unit structureVSAvoidloading process time
Core Design Contradiction:
Device complexityVSDuration of action of moving object

Solution Approach 1:

The system segments the loading function across multiple chamber units. Instead of one loading unit holding the tray until testing completes, separate chamber units independently perform loading, testing, and unloading operations on different trays simultaneously, eliminating the waiting period in the loading unit.

Inventive Principle:
Principle #1Segmentation

3Device complexity

If the test tray waits in the unloading unit until loading is completed, then the unloading unit structure is simple, but the unloading process time is delayed

Engineering Contradiction:
Improveunloading unit structureVSAvoidunloading process time
Core Design Contradiction:
Device complexityVSDuration of action of moving object

Solution Approach 1:

The unloading function is segmented and performed independently in separate chamber units. The third chamber unit handles unloading operations simultaneously with loading and testing operations in other chambers, eliminating the need for trays to wait in the unloading unit and reducing unloading process time.

Inventive Principle:
Principle #1Segmentation

4Productivity

If all chamber units operate in parallel with independent functions, then the productivity is improved, but the device complexity increases

Engineering Contradiction:
Improveprocessing throughputVSAvoidchamber unit configuration
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

Multiple chamber units are designed with universal functionality to perform loading, testing, and unloading operations. Each chamber unit can operate independently with the same set of capabilities, allowing parallel processing while using standardized modules that reduce overall system complexity through repetition of proven designs.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The rotatable test tray provides dynamic positioning capability that simplifies the chamber unit configuration. By allowing the tray to rotate and present devices in different orientations, each chamber unit can be designed with similar testing capabilities rather than requiring specialized configurations for each position, reducing overall system complexity while maintaining high productivity.

Inventive Principle:
Principle #15Dynamics

5Adaptability or versatility

If the testing arrangement varies between chamber units, then the adaptability is improved, but the manufacturing precision of device arrangement is compromised

Engineering Contradiction:
Improvetesting arrangement flexibilityVSAvoiddevice arrangement consistency
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The test tray incorporates rotatable positioning mechanisms that allow dynamic adjustment of device orientations. This enables the same physical tray to present devices in different orientations to different chamber units while maintaining precise control over the arrangement, achieving both adaptability and manufacturing precision through controlled rotational positioning.

Inventive Principle:
Principle #15Dynamics

Data Source

PatentUS9285420B2Apparatus for spinning test tray of in-line test handler and in-line test handler
Publication Date: 2016.03.15 MIRAE CORPORATION
  • US9285420B2 patent drawing
  • US9285420B2 patent drawing
  • US9285420B2 patent drawing

AI summary

Disclosed is an apparatus for spinning a test tray and an in-line test handler including the above apparatus, wherein the apparatus may include a supporting unit for supporting a test tray transported between first and second chamber units facing in the different directions, wherein the first chamber unit is provided at a predetermined interval from the second chamber unit; a base unit to which the supporting unit is spinnably connected; and a spinning unit which spins the test tray so that semiconductor devices received in the test tray are tested at the same arrangement in each of the first chamber unit and the second chamber unit.