In-line Test Handler Spinning Apparatus for Semiconductor Tray Orientation
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Solution Overview
Problem
Existing test handlers face delays in processing semiconductor devices due to sequential operation of loading, testing, and unloading processes, where trays must wait in specific units until processes are completed, and any issues in these units cause the entire system to stop.
Innovation Solution
An in-line test handler with a spinning apparatus that rotates the test tray to maintain consistent device arrangement across different chamber units, allowing for simultaneous processing and minimizing downtime by connecting chamber units and sorting units in-line with a conveyor system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the test tray is transferred sequentially through loading unit, testing unit, and unloading unit, then the process structure is simple, but the working time is delayed due to waiting periods
Solution Approach 1:
The test handler is divided into multiple independent chamber units (first chamber unit, second chamber unit, third chamber unit) that can operate simultaneously. Each chamber unit is a separate module that performs loading, testing, or unloading operations independently, allowing parallel processing of multiple test trays without sequential waiting.
Solution Approach 2:
The test tray is designed with rotatable positioning that allows dynamic adjustment of device orientations. The tray can rotate to present different devices to different chamber units in various orientations, enabling flexible routing and simultaneous processing while maintaining proper device alignment for testing.
2Device complexity
If the test tray waits in the loading unit until testing is completed, then the loading unit structure is simple, but the loading process time is delayed
Solution Approach 1:
The system segments the loading function across multiple chamber units. Instead of one loading unit holding the tray until testing completes, separate chamber units independently perform loading, testing, and unloading operations on different trays simultaneously, eliminating the waiting period in the loading unit.
3Device complexity
If the test tray waits in the unloading unit until loading is completed, then the unloading unit structure is simple, but the unloading process time is delayed
Solution Approach 1:
The unloading function is segmented and performed independently in separate chamber units. The third chamber unit handles unloading operations simultaneously with loading and testing operations in other chambers, eliminating the need for trays to wait in the unloading unit and reducing unloading process time.
4Productivity
If all chamber units operate in parallel with independent functions, then the productivity is improved, but the device complexity increases
Solution Approach 1:
Multiple chamber units are designed with universal functionality to perform loading, testing, and unloading operations. Each chamber unit can operate independently with the same set of capabilities, allowing parallel processing while using standardized modules that reduce overall system complexity through repetition of proven designs.
Solution Approach 2:
The rotatable test tray provides dynamic positioning capability that simplifies the chamber unit configuration. By allowing the tray to rotate and present devices in different orientations, each chamber unit can be designed with similar testing capabilities rather than requiring specialized configurations for each position, reducing overall system complexity while maintaining high productivity.
5Adaptability or versatility
If the testing arrangement varies between chamber units, then the adaptability is improved, but the manufacturing precision of device arrangement is compromised
Solution Approach 1:
The test tray incorporates rotatable positioning mechanisms that allow dynamic adjustment of device orientations. This enables the same physical tray to present devices in different orientations to different chamber units while maintaining precise control over the arrangement, achieving both adaptability and manufacturing precision through controlled rotational positioning.
Data Source
AI summary
Disclosed is an apparatus for spinning a test tray and an in-line test handler including the above apparatus, wherein the apparatus may include a supporting unit for supporting a test tray transported between first and second chamber units facing in the different directions, wherein the first chamber unit is provided at a predetermined interval from the second chamber unit; a base unit to which the supporting unit is spinnably connected; and a spinning unit which spins the test tray so that semiconductor devices received in the test tray are tested at the same arrangement in each of the first chamber unit and the second chamber unit.


