Test Terminal for Substrate Processing Setup
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Solution Overview
Problem
Conventional substrate processing apparatuses face challenges in reducing the time required for the setup process due to the limited number of operation units, making it difficult to perform setup processes concurrently across multiple process furnaces, and there is a lack of assurance that issues will be detected when switching from test programs to actual operational programs.
Innovation Solution
A setup system with a test terminal and pseudo comprehensive control unit that disconnects from the comprehensive control unit and operation unit, allowing parallel testing of process chamber operations across multiple process furnaces, enabling concurrent setup and ensuring compatibility with actual operational programs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If the number of operation units is increased to perform setup processes concurrently, then the time necessary for setup process is reduced, but the device complexity and cost increase
Solution Approach 1:
The test terminal is designed to perform multiple functions: it can execute both test programs for setup processes and actual operational programs for normal substrate processing. This multi-functionality allows a single device to replace what would otherwise require separate operation units, reducing device complexity while maintaining the capability for concurrent setup processes across multiple process furnaces
Solution Approach 2:
The test terminal creates a virtual copy of the operation unit environment, allowing operators to perform setup processes on multiple process furnaces simultaneously through a single interface. The test terminal program replicates the functionality needed to control and monitor multiple furnaces, enabling parallel setup operations without requiring physical multiplication of operation units
2Productivity
If a test program dedicated to setup process is installed into process furnace control units, then the setup process can be performed in parallel, but it becomes difficult to confirm whether problems arise when the actual program is executed
Solution Approach 1:
The system dynamically switches between test programs and actual operational programs in the process furnace control units. During setup processes, test programs are loaded to enable parallel execution and troubleshooting. Once setup is complete, the system transitions to actual operational programs for normal substrate processing. This dynamic program switching ensures both parallel setup capability and reliable operation with actual programs
Solution Approach 2:
The test terminal and test programs perform preliminary testing and validation of setup processes before the actual operational programs are executed. By conducting I/O checks, interlock checks, and robot teaching using test programs, potential problems are identified and resolved in advance, ensuring that when actual operational programs are later executed, they will run reliably without unexpected issues
Data Source
AI summary
A setup system at least including a substrate processing apparatus and a test terminal is provided. The substrate processing apparatus includes a plurality of process chambers, a plurality of process chamber control units, a comprehensive control unit and an operation unit. The test terminal is connected to the plurality of process chamber control units while the comprehensive control unit and the operation unit are disconnected from the plurality of process chamber control units. The test terminal transmits a process chamber test operation command to the plurality of process chamber control units by executing a test terminal program. The setup system is capable of reducing time necessary for a setup process when starting to operate the substrate processing apparatus with the plurality of process chambers.