Semiconductor Tester Log Acquisition With Authenticated Batch Requests

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Solution Overview

Problem

The existing log acquisition methods for semiconductor test devices are cumbersome and inefficient, particularly when dealing with multiple testers arranged in multiple levels, as they require manual connection of external storage devices and can lead to errors in selecting the correct tester, increasing the workload and risk of data security breaches.

Innovation Solution

A processing system with a management device that communicates with multiple testers to collectively request and authenticate log information, using tester-side identification to ensure secure and accurate acquisition, thereby reducing the workload and eliminating the need for manual connection of external storage devices.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If manual connection of external storage devices is used for log acquisition, then log information can be obtained from testers, but the workload increases and errors in selecting the correct tester occur

Engineering Contradiction:

Improveaccuracy of log acquisitionVSAvoidworkload of log acquisition

Core Design Contradiction:

ReliabilityVSEase of operation

Solution Approach 1:

The system performs automatic authentication and log acquisition without requiring manual intervention. The management device automatically connects to testers, authenticates using stored identification information, and retrieves logs, eliminating the need for operators to manually connect external storage devices to each tester.

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

Identification information is pre-stored in the management device before log acquisition operations. This preliminary setup allows the management device to automatically authenticate with testers without requiring manual intervention during the actual log acquisition process, reducing both workload and errors.

Inventive Principle:

Principle #10Preliminary action

2Reliability

If manual connection of external storage devices is used for log acquisition, then log information can be obtained from testers, but data security breaches become more risky

Engineering Contradiction:

Improvedata securityVSAvoidworkload of log acquisition

Core Design Contradiction:

ReliabilityVSEase of operation

Solution Approach 1:

The management device acts as an intermediary between operators and testers. It stores identification information and performs authentication operations, preventing direct manual access to testers and reducing the risk of data security breaches while maintaining operational efficiency.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

Inventive Principle:

Principle #25Self-service

3Productivity

If collective request command is used to acquire logs from multiple testers, then acquisition efficiency improves, but authentication complexity increases

Engineering Contradiction:

Improvelog acquisition efficiencyVSAvoidauthentication mechanism

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

Inventive Principle:

Principle #10Preliminary action

4Reliability

If authentication of tester identification is implemented, then data security is improved, but acquisition process complexity increases

Engineering Contradiction:

Improvedata securityVSAvoidauthentication process

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

Inventive Principle:

Principle #10Preliminary action

Data Source

PatentUS20240255561A1Processing system, management device, and log acquisition method

Publication Date: 2024.08.01 TOKYO ELECTRON LTD

AI summary

The processing system includes multiple testers configured to test a semiconductor device, and a management device connected to be capable of performing information communication with the multiple testers. The multiple testers are arranged in a height direction in two or more levels and each of the multiple testers includes a tester-side storage unit configured to store log information related to a state of the tester. The management device collectively outputs a request command for requesting log information to one or more selected testers determined by selecting all the multiple testers or some of the multiple testers, and acquires the log information from the selected tester that has received the request command. The management device acquires the log information when an authenticating unit determines that tester-side identification information matches management identification information, and disables acquisition of the log information to the management device when the authenticating unit determines that the tester-side identification information does not match the management identification information.