Testing Equipment Liquid Cooling Pressing Plate for DUT Thermal Management
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Solution Overview
Problem
During semiconductor component testing, thermal accumulation issues due to inadequate heat dissipation in the pressing head lead to overheating, damaging the device under test and affecting test accuracy.
Innovation Solution
A testing equipment with a component carrying device that includes a vacuum suction unit, a liquid temperature control device, and a fluid transmission assembly, which allows for direct thermal exchange between a working liquid and the device under test, improving heat dissipation efficiency by creating a liquid filling space for effective heat management.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a pressing head is used to press the DUT tightly for electrical connection, then electrical connection reliability is improved, but thermal accumulation occurs causing overheating and damaging the DUT
Solution Approach 1:
The patent introduces a pressing plate as an intermediary component between the pressing head and the DUT. The pressing plate includes a liquid cooling channel that circulates cooling liquid, serving as a thermal mediator to transfer heat away from the DUT while still enabling mechanical pressing for electrical connection. This resolves the contradiction by adding a thermal management function to the mechanical pressing component.
Solution Approach 2:
The patent employs hydraulic or pneumatic actuation through a piston-cylinder mechanism to apply controlled pressing force to the pressing plate. The pressing plate is driven to press the DUT against the test socket, providing reliable electrical connection while the integrated cooling channels manage the thermal load generated during pressing and testing.
2Stability of the object's composition
If pressing force is increased to ensure effective electrical connection, then connection stability is improved, but heat energy accumulation on the DUT increases causing overheating
Solution Approach 1:
The patent segments the pressing mechanism into distinct functional components: the pressing head for mechanical force application, the pressing plate with integrated cooling channels for thermal management, and the piston-cylinder mechanism for force actuation. This segmentation allows the pressing plate to specifically address thermal energy loss while the other components handle mechanical pressing functions.
Solution Approach 2:
The pressing plate acts as an intermediary between the pressing head and the DUT, incorporating cooling channels that circulate cooling liquid. This intermediary structure enables simultaneous mechanical pressing for stable connection and thermal management to prevent heat energy accumulation and overheating of the DUT.
3Ease of manufacture
If thermal dissipation efficiency of the pressing head is insufficient, then manufacturing simplicity is maintained, but the DUT may be damaged due to overheating leading to inaccurate testing data
Solution Approach 1:
The patent merges the pressing function and thermal dissipation function into a single integrated pressing plate component. The pressing plate combines mechanical pressing capability with embedded cooling channels, eliminating the need for a separate complex cooling system while ensuring adequate thermal management to prevent DUT overheating and maintain testing data accuracy.
Solution Approach 2:
The pressing plate with cooling channels serves as an intermediary that introduces active thermal management into the pressing mechanism. This intermediary structure improves thermal dissipation efficiency without significantly complicating manufacturing, as the cooling channels are integrated into the pressing plate rather than requiring separate pressing head and cooling system components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances heat dissipation efficiency, preventing overheating and ensuring accurate test results by directly exchanging heat with the device under test, thus eliminating thermal accumulation problems.
Implementation Method 1
a vacuum suction unit connected to the carrying arm for removably sucking to a top surface of the DUT
Implementation Method 2
the working liquid and the DUT are thermally exchanged with each other
Implementation Method 3
the liquid temperature control device continuously injects a working liquid to the top surface of the DUT through the fluid transmission assembly, and withdraws the working liquid away from the liquid filling space
Data Source
AI summary
A testing equipment includes a testing platform and a component carrying device including a carrying arm, a vacuum suction unit, a working bottom cover and a fluid transmission assembly. The carrying arm lifts and carries a device under test (DUT) onto the testing platform. The vacuum suction unit removably sucks to the DUT. The working bottom cover includes a cover body and an elastic airtight ring. The cover body is connected to the carrying arm, and the elastic airtight ring is fixedly disposed on the cover body for hermetically covering the DUT, so that a liquid filling space is collectively formed by the cover body and the DUT. The fluid transmission assembly extends into the liquid filling space for continuously passing a working liquid to the DUT and withdrawing the working liquid back away from the liquid filling space for thermally exchanging with the DUT.