Textured Bond Pads for Semiconductor Wire Bonding

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Solution Overview

Problem

The connection between bond wires and bond pads in semiconductor packages is often weak, leading to a high likelihood of detachment during electrical signal exchange.

Innovation Solution

The implementation of textured bond pads with intentionally formed protrusions on their surfaces, created through techniques like photolithography, chemical etching, or additive manufacturing, to increase the surface area and enhance the strength of the bond wire connection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If a smooth bond pad surface is used, then the manufacturing process is simple, but the bond wire connection strength is weak

Engineering Contradiction:
Improvebond wire connection strengthVSAvoidbond pad structure complexity
Core Design Contradiction:
StrengthVSDevice complexity

Solution Approach 1:

The bond pad surface is modified locally by adding protrusions at specific locations rather than changing the entire surface uniformly. This localized modification increases the connection strength where needed while keeping the rest of the bond pad structure simple and maintaining ease of manufacturing.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

Protrusions are formed on the bond pad surface during the manufacturing process before wire bonding occurs. This preliminary structuring of the surface prepares the bond pad to enhance wire connection strength in advance, eliminating the need for complex post-processing or specialized bonding techniques.

Inventive Principle:
Principle #10Preliminary action

2Reliability

If a textured bond pad surface with protrusions is created, then the bond wire connection strength increases, but the manufacturing process becomes more complex

Engineering Contradiction:
Improveelectrical pathway reliabilityVSAvoidbond pad fabrication ease
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The formation of protrusions on the bond pad is merged with existing manufacturing steps such as photolithography or chemical etching processes that are already used in semiconductor fabrication. By combining the texturing step with standard工艺流程, the overall manufacturing complexity is minimized while still achieving the reliability improvement.

Inventive Principle:
Principle #5Merging (Combining)

3Strength

If the bond pad surface area is increased through protrusions, then the connection strength improves, but the manufacturing precision requirements increase

Engineering Contradiction:
Improvebond wire attachment strengthVSAvoidprotrusion formation precision
Core Design Contradiction:
StrengthVSManufacturing precision

Solution Approach 1:

The protrusions on the bond pad are designed with specific dimensional parameters (height, width, spacing) that are optimized to provide sufficient connection strength. By carefully controlling these parameters within reasonable ranges rather than requiring extreme precision, the manufacturing difficulty is reduced while still achieving the desired strength improvement.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The textured surfaces significantly increase the strength of the bond wire connections, reducing the likelihood of detachment and improving the reliability of electrical pathways in semiconductor packages.

Implementation Method 1

chemically etching a top surface of the metal layer to form a textured top surface

Methodology Applied
Scientific EffectChemical etching:

Data Source

PatentUS11600583B2Textured bond pads
Publication Date: 2023.03.07 TEXAS INSTRUMENTS INC
  • US11600583B2 patent drawing
  • US11600583B2 patent drawing
  • US11600583B2 patent drawing

AI summary

In some examples, a package comprises a semiconductor die and a bond pad formed upon the semiconductor die. The bond pad has a protrusion on a top surface of the bond pad. The package also comprises a metal contact and a bond wire coupled to the protrusion and to the metal contact.