Textured ITO Electrode Surface for Higher Light Extraction

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Solution Overview

Problem

Optoelectronic devices face inefficiencies in light extraction due to radiation reflection from conductive oxide electrodes, leading to energy wastage and reduced output.

Innovation Solution

A textured surface is created on the transparent conductive material using a combination of titanium as the texturing material and Indium Tin Oxide (ITO) as the conductive material, with protuberances formed through heating, which increases light extraction efficiency by reducing internal reflection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If a transparent conductive oxide electrode is used, then electrical conductivity and transparency are achieved, but radiation reflection occurs reducing light extraction efficiency

Engineering Contradiction:
Improvelight extraction efficiencyVSAvoidradiation reflection
Core Design Contradiction:
Loss of energyVSObject-generated harmful factors

Solution Approach 1:

The patent applies surface texturing that creates curved and non-planar features on the conductive oxide electrode. This curvature modifies the optical path of reflected radiation, reducing internal reflection and improving light extraction efficiency from approximately 50% to 96% as stated in the technical effects.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Solution Approach 2:

The patent creates localized textured regions with protuberances and non-planar features on specific areas of the conductive oxide electrode. This local modification of surface quality allows different regions to have different optical properties, reducing reflection at critical interfaces while maintaining electrical conductivity.

Inventive Principle:
Principle #3Local quality

2Productivity

If the conductive oxide electrode surface is left flat, then manufacturing is simple, but internal reflection reduces output

Engineering Contradiction:
ImproveoutputVSAvoidsurface texturing process
Core Design Contradiction:
ProductivityVSEase of manufacture

Solution Approach 1:

The patent modifies the surface topology parameter of the conductive oxide electrode by introducing textured features with specific height, curvature, and distribution patterns. This parameter change transforms the optical interaction at the surface, reducing internal reflection and boosting output without fundamentally changing the manufacturing process flow.

Inventive Principle:
Principle #35Parameter changes

3Loss of energy

If a textured surface is created to reduce reflection, then light extraction efficiency improves, but device complexity increases

Engineering Contradiction:
Improvelight extraction efficiencyVSAvoidtextured surface structure
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The patent employs a self-texturing mechanism where the conductive oxide material itself forms the textured structure through controlled processing. This self-service approach creates the anti-reflection texture without requiring separate complex texturing equipment or multi-step processes, thereby improving light extraction while limiting complexity increase.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The textured surface enhances light extraction efficiency from approximately 50% in un-textured devices to 96% without compromising functional area, improving energy output and uniformity.

Implementation Method 1

conductive oxide electrodes can reflect a portion of the radiation back into the device

Methodology Applied
Scientific EffectInternal reflection: Reflection

Implementation Method 2

protuberances formed through heating

Methodology Applied
Scientific EffectHeating: Heating

Data Source

PatentUS11742458B2Textured optoelectronic devices and associated methods of manufacture
Publication Date: 2023.08.29 MICRON TECHNOLOGY INC
  • US11742458B2 patent drawing
  • US11742458B2 patent drawing
  • US11742458B2 patent drawing

AI summary

Textured optoelectronic devices and associated methods of manufacture are disclosed herein. In several embodiments, a method of manufacturing a solid state optoelectronic device can include forming a conductive transparent texturing material on a substrate. The method can further include forming a transparent conductive material on the texturing material. Upon heating the device, the texturing material causes the conductive material to grow a plurality of protuberances. The protuberances can improve current spreading and light extraction from the device.