Textured PVD Chamber Components to Reduce Film Flaking
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing chamber components in PVD chambers experience high film stress leading to material flaking, contamination, and reduced lifespan due to temperature differentials and manufacturing defects such as pores or cracks.
Innovation Solution
The development of chamber components with textured surfaces featuring independent surface features at a 45-degree angle to the base plane, manufactured through additive manufacturing, which are pore-free and enhance adhesion, reducing thermal stress and flaking.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If chamber components are manufactured using state-of-the-art metallic additive manufacturing technology, then manufacturing complexity is reduced and design flexibility is improved, but pores or cracks may form in the components during manufacturing which reduces structural integrity
Solution Approach 1:
The patent applies parameter changes by carefully controlling manufacturing parameters in the additive manufacturing process, specifically optimizing printing parameters and heat treatment conditions to eliminate pores and cracks while maintaining the benefits of additive manufacturing. The component is subjected to controlled heating at 200-400°C for 1-24 hours to densify the structure and eliminate manufacturing defects.
Solution Approach 2:
The patent employs composite material strategies by applying a porous coating layer (5-50 microns) over the additive manufactured component surface. This coating layer, which may be ceramic or metallic, creates a composite structure that provides wear resistance and protects the underlying additive manufactured component, effectively compensating for any residual manufacturing defects.
2Ease of manufacture
If chamber components have smooth surfaces, then manufacturing is easier, but high temperature differential causes high film stress leading to material flaking
Solution Approach 1:
The patent applies local quality by creating a textured surface with specific geometric features (protrusions and recesses) only on the component surfaces that contact deposited materials. This localized texturing promotes stress distribution and prevents flaking at critical interfaces, while the rest of the component maintains a smooth surface for ease of manufacture and cleaning.
Solution Approach 2:
The patent utilizes curved surface features including domes, arcs, and rounded protrusions instead of sharp angles. These curved geometries help distribute thermal stress more evenly across the surface, preventing stress concentration that would lead to flaking, while still providing the beneficial textured surface for film adhesion.
3Productivity
If chamber components operate with high temperature differential, then processing efficiency is improved, but high film stress results in flaking of deposited material
Solution Approach 1:
The patent applies segmentation by dividing the component surface into multiple zones with different texturing characteristics. Different surface regions have different protrusion heights, densities, and patterns, allowing optimization for both thermal management and film adhesion in different operational zones, thereby maintaining processing efficiency while preventing flaking.
Solution Approach 2:
The patent implements preliminary action by pre-texturing the component surfaces with specific geometric features before deposition begins. This pre-established surface topology promotes uniform film nucleation and growth, reducing stress during subsequent thermal cycling and preventing flaking during high-temperature operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively minimizes contamination and extends component lifespan by promoting uniform film adhesion and thermal stability, thereby reducing maintenance needs.
Implementation Method 1
The manufacture of the sub-half micron and smaller features in the semiconductor industry rely upon a variety of processing equipment, such as physical vapor deposition chambers (PVD)
Implementation Method 2
chamber components with features such as coil spacers are difficult to manufacture using state-of-the-art metallic additive manufacturing technology such as 3-D printing
Data Source
Figure 1A
Figure 1B
Figure 2
AI summary
Processing chamber components and methods of manufacture of same are provided herein. In some embodiments, a component part body includes a component part body having a base plane and at least one textured surface region, wherein the at least one textured surface region comprises a plurality of independent surface features having a first side having at least a 45 degree angle with respect to the base plane. In at least some embodiments, the textured surface includes a plurality of independent surface features which are pore free.