Textured Process Shield Forming Mandrel with Collapsible Jaws
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Solution Overview
Problem
Conventional methods for manufacturing process shields in semiconductor processing equipment, such as deep drawing and twin wire arc spray, are economically infeasible for low volume production and prone to inconsistencies and particle generation.
Innovation Solution
A mandrel with movable portions, including textured shoes and tapered jaws, is used to form and texture process shields in a single process, allowing for the shields to be removed without disassembly, utilizing a forming die to lock and collapse the mandrel for efficient production.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If deep drawing or hydroforming is used to manufacture process shields, then tubular parts can be formed, but the manufacturing cost is high due to expensive tooling and it is not economically feasible for low volume production
Solution Approach 1:
The mandrel is divided into multiple modular components including a body portion, head portion, and multiple textured shoes that can be independently positioned and adjusted. This segmentation allows for low-cost, low-volume production while maintaining manufacturing capability, as each component can be produced separately and assembled as needed rather than requiring expensive complete tooling sets.
Solution Approach 2:
The mandrel incorporates movable textured shoes that can be positioned and locked at different locations along the mandrel body. This dynamic positioning capability allows the same mandrel to produce different shield configurations for various production volumes and specifications, eliminating the need for multiple dedicated tooling sets and reducing overall manufacturing costs.
2Ease of manufacture
If twin wire arc spray is used to manufacture process shields, then shields can be formed, but the process is inconsistent, adds to manufacturing cost, and is subject to separation and particle generation due to sheet like film buildup
Solution Approach 1:
The textured shoes are pre-formed with the desired surface texture pattern before being mounted on the mandrel. This preliminary preparation ensures that the texturing is consistently applied during the forming process without the inconsistency and particle generation problems associated with twin wire arc spray, where texture is applied during manufacturing rather than being pre-established.
Solution Approach 2:
The textured shoes are designed as replaceable, cost-effective components that can be easily replaced when worn or damaged, rather than using expensive, complex spray equipment. This approach eliminates particle generation issues while maintaining manufacturing consistency through direct contact forming with pre-textured surfaces.
3Ease of operation
If a fixed mandrel is used for forming process shields, then the shield can be formed, but the mandrel cannot be collapsed to allow easy removal of the process shield
Solution Approach 1:
The mandrel head portion is designed to be movable relative to the body portion, allowing the head to be collapsed or retracted. This dynamic structure enables easy removal of the formed process shield from the mandrel without requiring disassembly of the entire mandrel or the formed part, while maintaining sufficient structural complexity only where needed for the collapsing mechanism.
Solution Approach 2:
The movable head portion is designed to nest within or collapse onto the body portion of the mandrel. This nesting arrangement allows the mandrel to compact to a smaller size for shield removal, then expand back to its forming configuration, simplifying the overall operation cycle without requiring complete disassembly of the mandrel structure.
4Productivity
If texturing is applied separately after forming, then the process shield can be formed first, but this requires an additional process step and increases manufacturing complexity
Solution Approach 1:
The texturing function is merged with the forming function by incorporating textured shoes directly onto the mandrel. As the mandrel forms the process shield, the textured surface of the shoes simultaneously imprints the desired texture pattern onto the shield surface. This combining of forming and texturing into a single operation eliminates separate texturing steps, increases production efficiency, and reduces overall process complexity.
Data Source
AI summary
A textured process shield and similar parts may be formed and textured in the same forming process using a mandrel. The mandrel may have movable portions that may be set into a forming die position to form and texture a workpiece into a process shield and collapsed to allow the process shield to be removed from the mandrel. The movable portions may include several textured shoes supported by movable jaws. The movable portions may also include a contact surface having angled indentations.