Textured Susceptor Surface for Accurate Thermal Sensing
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Solution Overview
Problem
The existing susceptor materials, such as graphite and silicon carbide, have an emissivity of about 0.8 for infrared light, leading to interference with temperature measurement by reflecting a noticeable portion of light emitted by heating lamps, which affects thermal sensor accuracy.
Innovation Solution
A susceptor with a textured surface featuring blind holes and surface textures is developed, where the blind holes have a diameter of at least 5 um, a depth of at least 5 um, and an aspect ratio of at least 1:1, and the surface textures include nano/micro-structures to enhance emissivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a susceptor made of graphite or silicon carbide is used, then the susceptor provides high purity, chemical resistance, and thermal stability, but the emissivity remains at about 0.8 causing light reflection that interferes with temperature measurement
Solution Approach 1:
The susceptor surface is modified with localized features (blind holes and surface textures) rather than changing the bulk material properties. This creates regions with enhanced emissivity (ε≥0.95) while maintaining the overall structural integrity and material properties of the graphite or silicon carbide susceptor
Solution Approach 2:
The susceptor incorporates blind holes forming a porous structure on the surface. This porous configuration increases the effective surface area and creates multiple internal reflections for incident light, thereby enhancing emissivity and reducing light reflection that would interfere with temperature measurement
2Stability of the object's composition
If the susceptor has an emissivity of 0.8, then the material maintains its inherent properties, but a noticeable portion of light is reflected off the susceptor interfering with thermal sensor measurement
Solution Approach 1:
The emissivity parameter of the susceptor surface is changed from 0.8 to at least 0.95 through physical modification (blind holes and textures). This parameter change reduces the harmful reflection effect while maintaining material composition stability, as the bulk material remains unchanged
3Measurement precision
If blind holes with diameter of at least 5 um and depth of at least 5 um are formed in the susceptor surface, then the emissivity increases to at least 0.95, but the manufacturing complexity increases
Solution Approach 1:
The susceptor surface is segmented into multiple blind holes distributed across the surface area. Each blind hole is a simple cylindrical feature, but their collective arrangement creates the enhanced emissivity effect. This segmentation approach achieves the desired optical performance without requiring complex monolithic structures
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The susceptor achieves an emissivity of at least 0.95, significantly reducing light reflection and improving temperature measurement accuracy by thermal sensors.
Implementation Method 1
The susceptor achieves an emissivity of at least 0.95, significantly reducing light reflection and improving temperature measurement accuracy by thermal sensors
Data Source
AI summary
Disclosed herewith are a susceptor, a processing chamber having the susceptor, and a method for making the susceptor. The susceptor includes a body, an upper surface area supported by the body, and a lower surface area support by the body. The upper surface area and the lower surface area comprise an array of blind holes, the blind holes having a diameter of at least 5 um, a depth of at least 5 um, and an aspect ratio of at least 1:1. The method includes forming the array of the blind holes in the upper surface area and the lower surface area of the susceptor and forming surface textures on the surfaces of the susceptor.