TFT Drain Electrode Segmentation for Parasitic Capacitance Reduction

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Solution Overview

Problem

In large-sized organic luminescence displays, parasitic capacitance in thin film transistors (TFTs) leads to signal delays, deteriorating video quality, and existing offset structures reduce drain current due to increased source/drain series resistance.

Innovation Solution

A TFT structure is designed with a back channel formed by a drain electrode that overlaps with the active layer but not the gate electrode, reducing parasitic capacitance and series resistance, while maintaining a high drain current through the use of an oxide semiconductor and an etch stop layer with specific hole configurations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If an offset structure is employed to reduce parasitic capacitance, then parasitic capacitance decreases, but source/drain series resistance increases causing drain current to drastically decrease

Engineering Contradiction:
Improveparasitic capacitanceVSAvoiddrain current
Core Design Contradiction:
Object-affected harmful factorsVSReliability

Solution Approach 1:

The drain electrode is divided into two distinct parts: a first part that overlaps with the gate electrode to maintain drain current, and a second part that is offset from the gate electrode to reduce parasitic capacitance. This segmentation allows each part to fulfill different functional requirements simultaneously.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the drain electrode are assigned different spatial relationships with the gate electrode. The first part (closer to source) overlaps with the gate to ensure current flow, while the second part (closer to drain) is offset to minimize capacitance. This local differentiation optimizes both electrical performance and signal integrity.

Inventive Principle:
Principle #3Local quality

2Reliability

If the drain electrode overlaps with the gate electrode to maintain drain current, then drain current is maintained, but parasitic capacitance increases causing signal delay

Engineering Contradiction:
Improvedrain currentVSAvoidsignal delay
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The drain electrode is segmented into overlapping and offset portions. The first part overlaps with the gate electrode to maintain adequate drain current, while the second part is offset to reduce parasitic capacitance and associated signal delays.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The solution transitions from a single uniform drain electrode configuration to a two-part structure with different spatial relationships to the gate, effectively adding a dimensional aspect to the electrode design to balance current maintenance and capacitance reduction.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Object-affected harmful factors

If source/drain series resistance increases in offset structure, then parasitic capacitance is reduced, but video quality deteriorates due to delayed on/off times

Engineering Contradiction:
Improveparasitic capacitanceVSAvoidvideo quality
Core Design Contradiction:
Object-affected harmful factorsVSEase of operation

Solution Approach 1:

By segmenting the drain electrode into overlapping and offset parts, the design reduces parasitic capacitance without creating excessive series resistance, thereby maintaining fast on/off switching times and preserving video quality.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention optimizes the geometric parameters of the drain electrode (overlap distance, offset distance, width) to achieve an optimal balance between parasitic capacitance and series resistance, ensuring both signal integrity and video quality.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS8785922B2Thin film transistor, organic luminescence display including the same, and method of manufacturing the organic luminescence display
Publication Date: 2014.07.22 SAMSUNG DISPLAY CO LTD
  • US8785922B2 patent drawing
  • US8785922B2 patent drawing
  • US8785922B2 patent drawing

AI summary

A thin film transistor (TFT) including a substrate; a gate electrode formed over the substrate, an active layer insulated from the gate electrode by using a gate insulation film; an etch stop layer which is formed over the active layer and includes first and second holes for exposing the active layer; a first electrode; and a second electrode including a first part and a second part. The first part is formed over the etch stop layer, and the second part is received in the second hole, contacts the active layer directly, and connects the first part to the active layer. At least one portion of the first part of the second electrode overlaps with the gate electrode. The second part of the second electrode does not overlap with and is separated from the gate electrode.