Thin Film Transistor Light Shielding Structure
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Solution Overview
Problem
Thin film transistors used in display devices are degraded by unwanted light, leading to changes in their characteristics, as they are not effectively protected from incident light.
Innovation Solution
A thin film transistor with a light shielding structure is designed, featuring a light shield layer with inclined surfaces that blocks incident light, and a semiconductor layer and gate electrode configuration that prevents light from affecting the transistor's operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional thin film transistor structure is used, then the device can be manufactured with standard processes, but the transistor characteristics are degraded by unwanted incident light
Solution Approach 1:
A light shielding layer is introduced as an intermediary component between the substrate and the transistor structure. This layer specifically blocks unwanted light wavelengths from reaching the transistor, preventing light-induced degradation while allowing the transistor to maintain its electrical characteristics and reliability
Solution Approach 2:
The light shielding structure is segmented into multiple inclined surfaces rather than a single flat layer. This segmentation allows the structure to block light from multiple angles and directions, providing comprehensive protection while maintaining compatibility with standard manufacturing processes
2Reliability
If a light shielding structure is added to protect the transistor, then light degradation is prevented, but the device complexity increases
Solution Approach 1:
The light shielding layer is merged with the existing transistor fabrication process flow. The inclined surfaces are formed using standard deposition and etching techniques that are already part of the manufacturing process, thereby adding protection functionality without significantly increasing overall device complexity
Solution Approach 2:
The light shielding structure serves multiple functions: it blocks unwanted light, provides a platform for subsequent spacer and electrode formation, and can be integrated with various transistor configurations. This multi-functionality reduces the need for additional separate components, maintaining manufacturing efficiency
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The light shielding structure effectively prevents light from degrading the transistor, allowing it to function as an optical sensor and maintain performance by blocking specific wavelengths and directions of light, ensuring reliable operation in various lighting conditions.
Implementation Method 1
a light shield layer intervened between the first spacer and the second spacer... the light shielding structure effectively prevents light from degrading the transistor
Data Source
AI summary
Provided is a thin film transistor including a substrate, a first spacer on the substrate, a second spacer on the first spacer, a light shield layer intervened between the first spacer and the second spacer, a semiconductor layer on the second spacer, and a gate electrode on the semiconductor layer, wherein the light shield layer includes a plurality of inclined surfaces against a top surface of the substrate.