Discrete-Time Thermal Control Loop for Ripple-Stable Heating Arrays

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Solution Overview

Problem

The semiconductor industry faces challenges in scaling down integrated circuits (ICs) while maintaining manufacturing complexity and efficiency, requiring advancements in IC design, processing, and thermal management systems that are not adequately addressed by existing technologies.

Innovation Solution

A discrete time loop based control system utilizing digital circuitry, including a modulator, error amplifier, discrete time controller, quantizer, and switched heating array, which tracks a desired temperature setting and stabilizes the control loop by adjusting operational frequency and integrating a switched capacitor bank, suppressing temperature ripple and filtering quantizer noise.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If discrete time loop based control system is used instead of analog circuitry, then space savings and manufacturing efficiency are improved, but implementation complexity increases

Engineering Contradiction:
Improvespace savingsVSAvoidimplementation complexity
Core Design Contradiction:
Area of stationary objectVSDevice complexity

Solution Approach 1:

The patent replaces analog circuitry with a discrete time loop based control system using digital circuitry. This substitution eliminates the need for complex analog components while achieving equivalent thermal control functionality, thereby reducing space requirements and improving manufacturing efficiency despite the inherent complexity of digital implementation.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent employs parameter changes by adjusting operational frequency and using a switched capacitor bank to integrate and filter signals. These parameter adjustments enable the digital control system to achieve stable thermal control with reduced ripple, resolving the complexity issue while maintaining the space savings advantage.

Inventive Principle:
Principle #35Parameter changes

2Stability of the object's composition

If operational frequency is adjusted and switched capacitor bank is integrated, then temperature ripple is suppressed and control stability is improved, but circuit complexity increases

Engineering Contradiction:
Improvecontrol stabilityVSAvoidcircuit complexity
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The patent uses periodic action through adjusted operational frequency to stabilize the control loop. By operating at optimized frequency intervals, the system achieves stable thermal control and suppresses temperature ripple without requiring excessively complex circuitry, as the periodic operation simplifies the control algorithm.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The switched capacitor bank acts as an intermediary element that integrates and filters quantizer noise while suppressing temperature ripple. This intermediary component enables stable control with reduced complexity compared to implementing complex filtering algorithms in pure digital logic.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables efficient thermal management with space savings, meeting or exceeding the performance of equivalent analog circuitry while allowing for precise control of heating elements, applicable beyond thermal control to other tracking systems.

Implementation Method 1

a heating array coupled to the multiple bits quantizer, wherein the heating array is configured to generate heat based on the digital code output

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Data Source

PatentUS11209878B2Discrete time loop based thermal control
Publication Date: 2021.12.28 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11209878B2 patent drawing
  • US11209878B2 patent drawing
  • US11209878B2 patent drawing

AI summary

In an embodiment, a circuit includes: an error amplifier; a temperature sensor, wherein the temperature sensor is coupled to the error amplifier; a discrete time controller coupled to the error amplifier, wherein the discrete time controller comprises digital circuitry; a multiple bits quantizer coupled to the discrete time controller, wherein the multiple bits quantizer produces a digital code output; and a heating array coupled to the multiple bits quantizer, wherein the heating array is configured to generate heat based on the digital code output.