Discrete-Time Thermal Control Loop for Ripple-Stable IC Heating

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Solution Overview

Problem

The semiconductor industry faces challenges in scaling down integrated circuits (ICs) while maintaining manufacturing complexity and efficiency, requiring advancements in IC design, processing, and thermal management systems that are not adequately addressed by existing technologies.

Innovation Solution

A discrete time loop based control system utilizing digital circuitry, including a modulator, error amplifier, discrete time controller, quantizer, and switched heating array, which tracks a desired temperature setting and stabilizes the control loop by adjusting operational frequency and integrating a switched capacitor bank, suppressing temperature ripple and filtering quantizer noise.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If discrete time loop based control system is implemented, then thermal management efficiency is improved and space is reduced, but system complexity increases

Engineering Contradiction:
Improvethermal management efficiencyVSAvoidcontrol system complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent replaces traditional analog thermal control circuitry with a discrete time loop based control system using digital components including a modulator, error amplifier, discrete time controller, quantizer, and switched heating array. This substitution achieves superior thermal management efficiency while reducing physical space requirements, as the digital implementation integrates more functions into smaller footprints despite increased circuit complexity.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The control system is segmented into distinct functional blocks: modulator, error amplifier, discrete time controller, quantizer, and switched heating array. Each block performs a specific function in the thermal control loop, allowing for modular design and optimization. This segmentation enables the system to achieve high efficiency through specialized processing in each stage while managing complexity through functional decomposition.

Inventive Principle:
Principle #1Segmentation

2Productivity

If scaling down of integrated circuits is pursued, then production efficiency is increased and costs are reduced, but manufacturing complexity increases

Engineering Contradiction:
Improveproduction efficiencyVSAvoidmanufacturing complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent employs parameter changes in the discrete time controller, specifically adjusting operational frequency and integrating switched capacitor banks to optimize performance at smaller scales. By modifying timing parameters and capacitance values, the system maintains effective thermal control in scaled-down IC configurations, enabling continued production efficiency gains from miniaturization while managing the inherent manufacturing complexity through parameter optimization rather than fundamental design changes.

Inventive Principle:
Principle #35Parameter changes

3Manufacturing precision

If discrete time controller with switched capacitor bank is used, then temperature control precision is improved, but circuit complexity increases

Engineering Contradiction:
Improvetemperature control precisionVSAvoidcircuit complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The discrete time controller operates using periodic switching of capacitor banks at controlled time intervals. This periodic action enables precise temperature control through time-domain modulation, where the timing and duration of capacitor switching events are optimized to achieve desired thermal responses. The periodic nature of the control allows for high precision temperature regulation while managing circuit complexity through time-based control strategies rather than requiring continuously varying analog signals.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables efficient thermal management with space savings, meeting or exceeding the performance of equivalent analog circuitry while allowing for precise control and reduced complexity in IC manufacturing.

Implementation Method 1

a heating array coupled to the multiple bits quantizer, wherein the heating array is configured to generate heat based on the digital code output

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 2

an error amplifier; a discrete time controller coupled to the error amplifier

Methodology Applied
Scientific EffectElectrical amplification: Magnetic Amplifier

Data Source

PatentUS11934239B2Discrete time loop based thermal control
Publication Date: 2024.03.19 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11934239B2 patent drawing
  • US11934239B2 patent drawing
  • US11934239B2 patent drawing

AI summary

In an embodiment, a circuit includes: an error amplifier; a temperature sensor, wherein the temperature sensor is coupled to the error amplifier; a discrete time controller coupled to the error amplifier, wherein the discrete time controller comprises digital circuitry; a multiple bits quantizer coupled to the discrete time controller, wherein the multiple bits quantizer produces a digital code output; and a heating array coupled to the multiple bits quantizer, wherein the heating array is configured to generate heat based on the digital code output.