Thermal Detector Compensation Device for Infrared Signal Accuracy

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing electromagnetic radiation detection systems face challenges in achieving a high fill factor and accurately determining the useful signal due to the presence of compensation devices, which are often thermally insulated and not optimally integrated with the readout substrate, leading to low signal response and interference from common mode and piezoelectric noise.

Innovation Solution

A detection system with a thermometric compensation transducer in thermal contact with the readout substrate, positioned between the absorbent membrane and the substrate, and optically insensitive to incident radiation, using p-n junction or PIN diodes, field-effect transistors, or thermistors to subtract common mode signals effectively, while maintaining improved thermal link and fill factor.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the compensation device is thermally insulated from the substrate, then the common mode measurement is improved, but the thermal link to the readout substrate is degraded

Engineering Contradiction:
Improvecommon mode measurementVSAvoidthermal link to substrate
Core Design Contradiction:
Measurement precisionVSTemperature

Solution Approach 1:

The compensation device is divided into two functional parts: a compensation membrane that is thermally insulated for accurate common mode measurement, and a compensation transducer that is thermally coupled to the substrate for signal readout. This segmentation allows each part to fulfill its specific thermal requirement independently.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The compensation membrane acts as an intermediary element between the electromagnetic radiation source and the compensation transducer. It is thermally insulated from the substrate to accurately sense environmental temperature changes while being optically coupled to the radiation, thereby mediating between thermal isolation requirements and signal transduction needs.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Productivity

If the fill factor is increased, then the detection efficiency is improved, but the integration of compensation device becomes more difficult

Engineering Contradiction:
Improvedetection efficiencyVSAvoidcompensation device integration
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The compensation device is merged with the thermal detector structure, sharing common elements such as the membrane support architecture and readout circuit integration. This merging reduces overall device complexity while allowing both detectors to occupy the pixel area efficiently, thereby increasing the fill factor.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The membrane structure serves dual functions: supporting the absorbent membrane for the thermal detector and supporting the compensation membrane for the compensation device. This multi-functionality reduces the number of separate structural elements needed, simplifying integration while maximizing the usable area for radiation detection.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Measurement precision

If the useful signal response is increased, then the detection sensitivity is improved, but the common mode interference remains significant

Engineering Contradiction:
Improveuseful signal responseVSAvoidcommon mode interference
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The compensation device provides feedback about the common mode temperature variations affecting the thermal detector. By continuously monitoring the temperature through the thermally insulated compensation membrane and subtracting this common mode signal from the thermal detector output, the system effectively eliminates common mode interference while preserving the useful signal.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The common mode signal is extracted from the total signal using the compensation device. The compensation membrane, being thermally insulated, exclusively measures the environmental temperature component, which is then separated and removed from the thermal detector signal, leaving only the useful radiation-induced signal.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances the accuracy of signal determination by effectively compensating common mode signals and reducing interference, thereby improving the detection system's sensitivity and fill factor, especially in infrared or terahertz radiation detection.

Implementation Method 1

The absorbent membrane comprises an absorber for absorbing the electromagnetic radiation to be detected

Methodology Applied
Scientific EffectAbsorption of electromagnetic radiation: Absorption (EM radiation)

Implementation Method 2

associated with a thermometric transducer an electrical property of which varies in terms of intensity on the basis of the heating thereof

Methodology Applied
Scientific EffectHeating: Heating

Implementation Method 3

a reflector for reflecting the electromagnetic radiation, arranged between the absorbent membrane and the readout substrate

Methodology Applied
Scientific EffectReflection of electromagnetic radiation: Reflection

Implementation Method 4

associated with a thermometric transducer an electrical property of which varies in terms of intensity on the basis of the heating thereof

Methodology Applied
Scientific EffectThermometric detection: Thermistor

Implementation Method 5

at least one compensation device, comprising a thermometric compensation transducer, in thermal contact with the readout substrate

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS11815400B2Sensitive pixel based detection system comprising a thermal detector and a compensation device
Publication Date: 2023.11.14 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
  • US11815400B2 patent drawing
  • US11815400B2 patent drawing
  • US11815400B2 patent drawing

AI summary

A detection system includes a readout substrate, at least one thermal detector associated with a reflector, and at least one compensation device including a compensation transducer in thermal contact with the readout substrate, arranged between the reflector and the readout substrate, and situated facing the reflector so as to be optically insensitive to the incident electromagnetic radiation.