In-situ Temperature Sensing Substrate with Thermal Expansion Slug
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Solution Overview
Problem
Existing temperature measurement techniques in high-temperature environments, such as epitaxy chambers, are inadequate due to limitations in sensitivity, range, and density, leading to inefficient metrology and irreversible peak temperature indicators that cannot be reused.
Innovation Solution
A sensor system with thermally expandable materials or coils integrated into a substrate, which actuates a slug to indicate peak temperatures, allowing for precise detection of temperature distributions across the substrate using electromagnetic or optical readers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional temperature measurement techniques are used in high-temperature environments, then temperature detection is possible, but measurement precision and sensitivity are inadequate
Solution Approach 1:
The patent replaces traditional electronic temperature sensing mechanisms with a mechanical expansion-based indication system. A thermally expandable material (solid, liquid, or gas) physically expands in response to temperature changes, moving a slug along a channel to indicate peak temperature mechanically, thereby eliminating sensitivity issues associated with electronic sensors in high-temperature environments.
Solution Approach 2:
The invention directly utilizes thermal expansion of a contained material (solid, liquid, or gas) as the core measurement mechanism. As temperature increases, the expandable material increases in volume, pushing the slug to a position that indicates the peak temperature experienced. This physical phenomenon provides reliable and precise measurement in high-temperature environments where electronic sensors fail.
2Measurement precision
If irreversible peak temperature indicators are used, then peak temperature detection is achieved, but the indicators cannot be reused
Solution Approach 1:
The patent creates a dynamic, reversible measurement system where the slug can move forward to indicate peak temperature and then be reset to its initial position. The expandable material can contract or be mechanically reset, allowing the sensor to be reused multiple times for continuous temperature monitoring, thereby improving productivity and eliminating the need for disposable indicators.
Solution Approach 2:
Instead of discarding the sensor after single use, the invention enables recovery and reuse of the temperature indicator. The slug and expandable material system can be reset to their initial states, allowing the same sensor to detect peak temperatures across multiple measurement cycles, thus recovering the sensor's measurement capability for continued use.
3Measurement precision
If multiple temperature sensing elements are distributed across the substrate, then temperature distribution measurement is improved, but device complexity increases
Solution Approach 1:
The patent divides the temperature measurement function into multiple independent sensing elements distributed across the substrate. Each element contains its own expandable material and slug mechanism, allowing parallel measurement at different locations. This segmentation enables comprehensive temperature distribution mapping while keeping each individual sensing element relatively simple in structure.
Solution Approach 2:
The invention uses multiple copies of the same basic sensing element design distributed across the substrate. Each copying of the cavity-channel-slug mechanism provides identical measurement functionality at different locations, simplifying the overall system design by repeating a standardized, simple unit rather than creating complex integrated sensing structures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and reversible detection of peak temperatures across multiple sites on a substrate, improving temperature control and reducing metrology-related inefficiencies in high-temperature environments.
Implementation Method 1
The thermally expandable material is configured to extend from the cavity into the channel (e.g., due to thermal excitation) to actuate the slug from a first position within the channel to at least a second position within the channel
Implementation Method 2
When the thermally expandable coil expands (e.g., due to thermal excitation), the thermally expandable coil is configured to actuate the slug from a first position to at least a second position
Data Source
AI summary
A sensor for detecting a temperature distribution imparted on a substrate in an environment is disclosed. The sensor includes a sensor substrate with one or more temperature sensing elements formed on the sensor substrate. In embodiments, a temperature sensing element includes at least one cavity with a thermally expandable material disposed within the cavity and a channel extending from the cavity with a slug disposed within the channel. In embodiments, the cavity has a fixed volume and is enclosed by a cover layer disposed or formed over the cavity. The thermally expandable material is configured to extend from the cavity into the channel to actuate the slug from a first position within the channel to at least a second position within the channel, where the position of the slug is indicative of a temperature of a respective portion of the sensor substrate.