Thermal Flow Sensor Diaphragm Correction Circuit High-Frequency Ripple

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Solution Overview

Problem

Conventional thermal flow sensors experience response delay and errors at high-frequency engine rippling, leading to significant measurement inaccuracies, particularly in regions with high ripple amplitudes, which are exacerbated by the inertial effects of bypass structures.

Innovation Solution

A thermal flow sensor design featuring a diaphragm with thin-film elements, heat generating and temperature measuring resistors, and a correction circuit that processes temperature differences to adjust output signals, effectively cutting off peak values and reducing errors through clamp correction methods.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a thermal flow sensor with thin-film elements and bypass structure is used, then measurement accuracy is improved in low ripple regions, but response delay and rich error occur in high-frequency rippling over 100 Hz

Engineering Contradiction:
Improveflow rate measurement accuracyVSAvoidresponse delay
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent applies parameter changes by modifying the thermal capacity of the sensor through thin-film element design and bypass structure optimization. By adjusting the thermal capacity parameter, the sensor achieves faster response characteristics while maintaining measurement accuracy across different ripple conditions.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent implements dynamics by making the sensor responsive to dynamic flow conditions through the bypass structure that allows air to flow around the sensor element. This dynamic bypass mechanism enables the sensor to adapt to high-frequency rippling conditions while reducing response delay.

Inventive Principle:
Principle #15Dynamics

2Measurement precision

If bypass structure is designed to reduce lean error, then response delay is compensated, but rich error is induced in high ripple amplitude regions of 200% or more

Engineering Contradiction:
Improveflow rate measurement accuracyVSAvoidrich error
Core Design Contradiction:
Measurement precisionVSObject-generated harmful factors

Solution Approach 1:

The patent applies local quality by creating different flow path characteristics in different regions of the sensor. The bypass structure provides a localized alternative flow path that compensates for response delay in normal conditions while the thin-film elements maintain accurate local temperature measurements even in high ripple amplitude regions.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent replaces the mechanical bypass flow compensation method with a thermal field-based correction approach. By using temperature difference measurements from upstream and downstream resistors, the system substitutes mechanical compensation with thermal field analysis to eliminate both lean and rich errors.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Device complexity

If conventional bobbin type flow sensor is used, then结构简单 (structure is simple), but backward flow detection capability is lost and rich error occurs

Engineering Contradiction:
Improvesensor structureVSAvoidbackward flow detection accuracy
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The patent replaces the mechanical bobbin structure with a thermal field-based detection system. By measuring temperature differences caused by heat transfer from the heater to the flowing air, the system detects flow direction and rate without mechanical moving parts, achieving both simplicity and accuracy.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the detection parameter from mechanical displacement to thermal field characteristics. By monitoring temperature differences and heat transfer rates, the sensor achieves backward flow detection capability while maintaining a simple structure without mechanical components.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances measurement accuracy by minimizing response delays and errors, even in high ripple amplitude conditions, providing a more precise air flow rate measurement.

Implementation Method 1

at least one heat generating resistor on the diaphragm

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 2

at least one temperature measuring resistor that detects temperature on each of an upstream side and a downstream side of the heat generating resistor

Methodology Applied
Scientific EffectResistive temperature detection: Electrical Resistance

Implementation Method 3

the wafer is thinned through the back etching, so that the thermal capacity is suppressed

Methodology Applied
Scientific EffectThermal capacity reduction: Thermal Insulation

Data Source

PatentEP3043155B1Thermal flow sensor
Publication Date: 2020.05.13 HITACHI AUTOMOTIVE SYST LTD
  • EP3043155B1 patent drawingFigure 1
  • EP3043155B1 patent drawingFigure 2
  • EP3043155B1 patent drawingFigure 3(a)~3(b)

AI summary

A thermal flow sensor with improved measurement accuracy is provided. The thermal flow sensor includes: an air flow rate detection element with a diaphragm having a thin-film portion in a semiconductor substrate; at least one heat generating resistor on the diaphragm; at least one temperature measuring resistor that detects temperature on each of an upstream side and a downstream side of the heat generating resistor; and a correction circuit portion that processes an output signal of the air flow rate detection element on the basis of temperature difference information of at least the two temperature measuring resistors on the upstream side and the downstream side, wherein a waveform of the output signal processed by the correction circuit portion is a waveform obtained by cutting a part of a mountain part or a valley part constituting a peak value by outputting of an arbitrary predetermined value when the peak value of the waveform exceeds the arbitrary predetermined value.