Thermal Flow Sensor Diaphragm Correction Circuit High-Frequency Ripple
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Solution Overview
Problem
Conventional thermal flow sensors experience response delay and errors at high-frequency engine rippling, leading to significant measurement inaccuracies, particularly in regions with high ripple amplitudes, which are exacerbated by the inertial effects of bypass structures.
Innovation Solution
A thermal flow sensor design featuring a diaphragm with thin-film elements, heat generating and temperature measuring resistors, and a correction circuit that processes temperature differences to adjust output signals, effectively cutting off peak values and reducing errors through clamp correction methods.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a thermal flow sensor with thin-film elements and bypass structure is used, then measurement accuracy is improved in low ripple regions, but response delay and rich error occur in high-frequency rippling over 100 Hz
Solution Approach 1:
The patent applies parameter changes by modifying the thermal capacity of the sensor through thin-film element design and bypass structure optimization. By adjusting the thermal capacity parameter, the sensor achieves faster response characteristics while maintaining measurement accuracy across different ripple conditions.
Solution Approach 2:
The patent implements dynamics by making the sensor responsive to dynamic flow conditions through the bypass structure that allows air to flow around the sensor element. This dynamic bypass mechanism enables the sensor to adapt to high-frequency rippling conditions while reducing response delay.
2Measurement precision
If bypass structure is designed to reduce lean error, then response delay is compensated, but rich error is induced in high ripple amplitude regions of 200% or more
Solution Approach 1:
The patent applies local quality by creating different flow path characteristics in different regions of the sensor. The bypass structure provides a localized alternative flow path that compensates for response delay in normal conditions while the thin-film elements maintain accurate local temperature measurements even in high ripple amplitude regions.
Solution Approach 2:
The patent replaces the mechanical bypass flow compensation method with a thermal field-based correction approach. By using temperature difference measurements from upstream and downstream resistors, the system substitutes mechanical compensation with thermal field analysis to eliminate both lean and rich errors.
3Device complexity
If conventional bobbin type flow sensor is used, then结构简单 (structure is simple), but backward flow detection capability is lost and rich error occurs
Solution Approach 1:
The patent replaces the mechanical bobbin structure with a thermal field-based detection system. By measuring temperature differences caused by heat transfer from the heater to the flowing air, the system detects flow direction and rate without mechanical moving parts, achieving both simplicity and accuracy.
Solution Approach 2:
The patent changes the detection parameter from mechanical displacement to thermal field characteristics. By monitoring temperature differences and heat transfer rates, the sensor achieves backward flow detection capability while maintaining a simple structure without mechanical components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances measurement accuracy by minimizing response delays and errors, even in high ripple amplitude conditions, providing a more precise air flow rate measurement.
Implementation Method 1
at least one heat generating resistor on the diaphragm
Implementation Method 2
at least one temperature measuring resistor that detects temperature on each of an upstream side and a downstream side of the heat generating resistor
Implementation Method 3
the wafer is thinned through the back etching, so that the thermal capacity is suppressed
Data Source
Figure 1
Figure 2
Figure 3(a)~3(b)
AI summary
A thermal flow sensor with improved measurement accuracy is provided. The thermal flow sensor includes: an air flow rate detection element with a diaphragm having a thin-film portion in a semiconductor substrate; at least one heat generating resistor on the diaphragm; at least one temperature measuring resistor that detects temperature on each of an upstream side and a downstream side of the heat generating resistor; and a correction circuit portion that processes an output signal of the air flow rate detection element on the basis of temperature difference information of at least the two temperature measuring resistors on the upstream side and the downstream side, wherein a waveform of the output signal processed by the correction circuit portion is a waveform obtained by cutting a part of a mountain part or a valley part constituting a peak value by outputting of an arbitrary predetermined value when the peak value of the waveform exceeds the arbitrary predetermined value.