Thermal Tunable Laser With Suspended Isolation Structure

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Solution Overview

Problem

Monolithically integrated tunable lasers face challenges in achieving narrow laser line width and low power consumption due to heat loss and lattice mismatch issues in thermal tuning, which affect the efficiency and reliability of the thermal tuning assembly.

Innovation Solution

A thermal tuning assembly with a suspended isolation structure is fabricated using InGaAs etch stop layers and InP or InAlAs sacrificial layers, providing greater thermal conductivity and reducing heat loss, while employing dielectric layers for protection during etching to maintain structural integrity and minimize manufacturing defects.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If thermal tuning is used to achieve narrow laser line width, then laser line width is improved, but power consumption increases due to heat loss

Engineering Contradiction:
Improvelaser line widthVSAvoidpower consumption
Core Design Contradiction:
Measurement precisionVSUse of energy by moving object

Solution Approach 1:

A suspended thermal isolation structure is introduced as an intermediary between the heating element and the substrate. This structure mediates heat transfer by providing thermal isolation, preventing heat loss to the substrate while maintaining the thermal tuning function for narrow laser line width with reduced power consumption

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The thermal isolation structure is positioned locally beneath the heating element and waveguide region. This localized approach provides thermal confinement exactly where needed for laser tuning, improving thermal efficiency without affecting other parts of the device

Inventive Principle:
Principle #3Local quality

2Loss of energy

If thermal isolation structure is etched out of sacrificial layer, then thermal conductivity is improved, but manufacturing complexity increases

Engineering Contradiction:
Improveheat lossVSAvoidmanufacturing complexity
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The sacrificial layer is pre-formed between the substrate and the waveguide layer before the heating element is attached. This preliminary action simplifies the subsequent etching process, as the sacrificial layer is already in position to define the thermal isolation structure, reducing manufacturing complexity while achieving the desired thermal conductivity improvement

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The sacrificial layer is selectively removed through etching to create the suspended thermal isolation structure. This extraction process creates the necessary thermal isolation voids while leaving the InGaAs etch stop layers intact, achieving improved thermal conductivity through a controlled manufacturing process

Inventive Principle:
Principle #2Taking out (Extraction)

3Manufacturing precision

If InGaAs etch stop layers are used to contain etch, then manufacturing precision is improved, but device complexity increases

Engineering Contradiction:
Improveetch containmentVSAvoidlayer structure
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The InGaAs etch stop layers are designed to automatically stop the etching process when reached, without requiring additional control mechanisms. This self-service property of the etch stop layers provides precise etch containment and defines the thermal isolation structure boundaries, improving manufacturing precision while the layered structure itself is part of the standard laser fabrication process

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves a narrower laser line width and reduced power consumption by effectively isolating heat and minimizing lattice mismatch, resulting in a more efficient thermal tuning process comparable to current injection tuning.

Implementation Method 1

a thermal insulation layer positioned between the waveguide layer and the lower surface

Methodology Applied
Scientific EffectThermal insulation: Thermal Insulation

Implementation Method 2

a thermal tuning assembly comprising a heating element positioned on the upper surface

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Data Source

PatentEP2989699B1Tunable laser with high thermal wavelength tuning efficiency
Publication Date: 2019.12.25 HUAWEI TECH CO LTD
  • EP2989699B1 patent drawingFigure 1~2
  • EP2989699B1 patent drawingFigure 3~5
  • EP2989699B1 patent drawingFigure 6~7

AI summary

A monolithically integrated thermal tunable laser comprising a layered substrate comprising an upper surface and a lower surface, and a thermal tuning assembly comprising a heating element positioned on the upper surface, a waveguide layer positioned between the upper surface and the lower surface, and a thermal insulation layer positioned between the waveguide layer and the lower surface, wherein the thermal insulation layer is at least partially etched out of an Indium Phosphide (InP) sacrificial layer, and wherein the thermal insulation layer is positioned between Indium Gallium Arsenide (InGaAs) etch stop layers.