Thermally Tuned Permanent Magnetic Lens for Precise Field Control
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Solution Overview
Problem
Existing charged particle lenses using permanent magnets face challenges in precision adjustment and manufacturing tolerances, leading to inaccuracies in magnetic field control, which affects the optical properties and increases stray fields in multi-column systems.
Innovation Solution
A charged particle lens design incorporating a magnetic circuit assembly with permanent magnets and a thermal control assembly, allowing for precise adjustment of magnetic fields through temperature control, and an electromagnetic lens with electrically conductive electrode elements to fine-tune optical parameters, reducing cross-talk and improving precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If permanent magnets are used in charged particle lenses, then the lens structure becomes more compact and manufacturing is simplified, but manufacturing tolerances increase leading to lower precision in magnetic field control
Solution Approach 1:
The patent applies parameter changes by introducing thermal control elements that modify the temperature of permanent magnets to adjust their magnetic flux density. This allows compensation for manufacturing tolerances by dynamically changing the magnetic parameters (flux density) after assembly, thereby achieving precise magnetic field control despite variations in permanent magnet manufacturing.
Solution Approach 2:
The patent replaces mechanical adjustment methods with thermal control mechanisms. Instead of mechanically adjusting permanent magnets to achieve desired magnetic fields, the system uses thermal fields (heating/cooling elements) to modify the magnetic properties of permanent magnets, providing a more precise and controllable method for field adjustment.
2Ease of manufacture
If conventional magnetic lenses are used, then manufacturing is simpler, but optical property adjustment precision is limited
Solution Approach 1:
The patent transforms a static magnetic lens system into a dynamic one by incorporating thermal control elements that can actively adjust the magnetic flux density of permanent magnets. This dynamic capability allows continuous optimization of optical properties (focal length, focus position) during operation, significantly improving adjustment precision compared to fixed conventional lenses.
Solution Approach 2:
The system changes the operating parameters of permanent magnets through thermal control, modifying their magnetic flux density to achieve precise optical property adjustment. This parameter modification approach enables fine-tuning of lens characteristics without requiring complex mechanical adjustments or higher-precision manufacturing.
3Productivity
If multi-column systems are implemented, then productivity increases, but cross-talk between columns increases due to stray fields
Solution Approach 1:
The patent implements feedback control by using sensors to detect stray magnetic fields and adjusting the thermal control parameters of permanent magnets to compensate for field leakage. This active feedback mechanism minimizes cross-talk between adjacent columns in multi-column systems, enabling higher productivity without sacrificing pattern quality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables high-precision control of magnetic fields, reducing manufacturing tolerances by an order of magnitude and minimizing stray fields, resulting in improved optical properties and increased efficiency in multi-column systems for nano-patterning applications.
Implementation Method 1
a thermal control element, which can be used to modify a temperature of at least one component of the magnetic circuit assembly and, by this, adjust or even alter the magnetic flux in the magnetic circuit assembly
Implementation Method 2
The permanent magnet and the yoke body form a closed magnetic circuit, but for having at least two gaps formed between respective faces of different yoke components opening at the beam passage; thus, the magnetic circuit directs a magnetic flux effected by the permanent magnets through the yoke body and induces a magnetic field in the gaps
Implementation Method 3
It is this magnetic field from the gaps that is used to form a magnetic lens for the charged particle beam propagating in the beam passage along the longitudinal axis
Data Source
AI summary
A fine-adjustable charged particle lens comprises a magnetic circuit assembly including permanent magnets and a yoke body, surrounding a beam passage extending along the longitudinal axis. The permanent magnet is arranged between an inner yoke component and an outer yoke component so as to form a magnetic circuit having at least two gaps, generating a magnetic field reaching inwards into the beam passage, into which a sleeve insert having electrostatic electrodes can be inserted, which may also generate an electric field spatially overlapping said magnetic field. In order to modify the magnetic flux and thus the magnetic field in the gaps, a thermal control element located in the yoke body introduces or extracts heat to or from components of the of the magnetic circuit assembly so as to thermally control or modulate the magnetic behavior of said components.