Hybrid Thermal Pressure Sensor Flow Rate Calibration

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Solution Overview

Problem

Thermal mass flow sensors are slow to respond to changes in fluid flow rate due to their inherent time constant, leading to inaccurate mass flow rate calculations during fluctuations, and existing devices rely solely on thermal measurements without combining thermal and pressure-based measurements.

Innovation Solution

A system and method that combines thermal and pressure sensor signals to determine fluid flow rate, using thermal sensors to generate a thermal sensor-based mass flow rate and pressure sensors to generate a pressure sensor-based mass flow rate, with calibration factors adjusting the pressure sensor-based rate to improve accuracy during stable and fluctuating conditions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If thermal mass flow sensors are used to measure fluid flow rate, then measurement accuracy is maintained during stable conditions, but response time is slow (2-4 seconds time constant) causing inaccurate measurements during flow fluctuations

Engineering Contradiction:
Improvemass flow rate measurement accuracyVSAvoidresponse time to flow changes
Core Design Contradiction:
Measurement precisionVSSpeed

Solution Approach 1:

The patent combines a thermal mass flow sensor with a pressure sensor to create a hybrid measurement system. The thermal sensor provides accurate measurements during stable conditions, while the pressure sensor provides rapid response during flow fluctuations. The electronics process both signals together to generate a corrected mass flow rate that maintains accuracy across all operating conditions.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The pressure sensor acts as an intermediary that detects flow changes rapidly and provides signal information that complements the thermal sensor's accurate but slow measurements. The electronics use the pressure sensor signal to correct and accelerate the thermal sensor's response, effectively using the pressure sensor as a mediator to bridge the response time gap.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Speed

If mathematical acceleration techniques are applied to thermal mass flow sensor signals, then response time is reduced, but noise in the thermal sensor signal increases

Engineering Contradiction:
Improveresponse timeVSAvoidsignal noise level
Core Design Contradiction:
SpeedVSMeasurement precision

Solution Approach 1:

The pressure sensor serves as an intermediary that provides clean, noise-free signal information about flow changes. Instead of applying noisy mathematical acceleration to the thermal sensor signal, the system uses the pressure sensor's rapid response as a clean reference to correct the thermal sensor output, avoiding the introduction of additional noise.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The electronics process the pressure sensor signal and use it to generate a correction signal that is fed back to adjust the thermal sensor's mass flow rate output. This feedback mechanism allows the system to respond quickly to flow changes while maintaining signal quality, as the correction is based on the clean pressure sensor measurements rather than noisy mathematical operations.

Inventive Principle:
Principle #23Feedback

3Device complexity

If only thermal based flow measurement is used, then device complexity is low, but measurement accuracy deteriorates during fluctuating flow conditions

Engineering Contradiction:
Improvesensor system complexityVSAvoidmass flow rate accuracy during fluctuations
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The patent merges a thermal mass flow sensor with a pressure sensor into a single integrated measurement system. The electronics combine signals from both sensors to produce a corrected mass flow rate that maintains accuracy during both stable and fluctuating conditions. This combination resolves the limitation of thermal-only systems while adding only moderate complexity.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The combined approach provides accurate mass flow rate measurements during both stable and fluctuating conditions, enhancing the responsiveness and accuracy of fluid flow rate determination compared to relying solely on thermal sensors.

Implementation Method 1

thermal mass flow sensors determine mass flow via a measurement of heat transfer or energy consumption during a transfer of heat

Methodology Applied
Scientific EffectHeat transfer: Conduction (thermal)

Implementation Method 2

one particular type of thermal mass flow sensor determines flow rate by heating or cooling a fluid as it flows through a conduit and measuring a temperature change in the fluid

Methodology Applied
Scientific EffectConvection: Convection

Implementation Method 3

The at least one pressure sensor generates a pressure sensor signal, which indicates the pressure of the fluid

Methodology Applied
Scientific EffectPressure measurement:

Data Source

PatentUS8504318B2System, method and computer program for determining fluid flow rate using a pressure sensor and a thermal mass flow sensor
Publication Date: 2013.08.06 BROOKS INSTRUMENT LLC
  • US8504318B2 patent drawing
  • US8504318B2 patent drawing
  • US8504318B2 patent drawing

AI summary

The present invention relates to a system, method, and computer program product for determining the flow rate of a fluid. The system, method, and computer program product generate a thermal sensor based mass flow rate for the fluid, where the thermal sensor based mass flow rate is determined at least in part from the thermal sensor signal (36). The system, method, and computer program product generate a pressure sensor based mass flow rate for the fluid, wherein the pressure sensor based mass flow rate is determined at least in part from the pressure sensor signal (51a). The system, method, and computer program product generate at least one calibration factor (ψ) using the thermal sensor based mass flow rate and the pressure sensor based mass flow rate. The system, method, and computer program product may generate a calibrated pressure sensor based mass flow rate by using the at least one calibration factor (ψ) to modify the pressure sensor based mass flow rate. The system, method, and computer program product may generate a calibrated thermal sensor based mass flow rate by using the at least one calibration factor (ψ) to modify the thermal sensor based mass flow rate.