Thermal Sensor Mounting on Fluid Control Instruments
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Solution Overview
Problem
The integrated fluid control apparatus in semiconductor manufacturing lacks sufficient space for installing thermal sensors, making it difficult to install them effectively.
Innovation Solution
A fluid control apparatus with a supporting member attached to adjacent fluid control instruments to support a thermal sensor, allowing for simple and effective installation by utilizing the available space, using a thermal sensor that measures temperature via the Seebeck effect and integrating it with flow rate controllers and opening-and-closing valves.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If multiple fluid control instruments are arranged adjacently to achieve integration, then device complexity is reduced and space is saved, but sufficient space for installing thermal sensors becomes unavailable
Solution Approach 1:
The patent utilizes the vertical dimension by attaching the supporting member to the outer peripheral surface of the fluid control instrument body. This allows the thermal sensor to be installed in the vertical direction rather than requiring horizontal space, thereby resolving the space conflict caused by adjacent arrangement of multiple fluid control instruments.
Solution Approach 2:
The supporting member is designed to be attached to the outer peripheral surface of the fluid control instrument body, effectively nesting the sensor support structure within the existing device footprint. This allows the thermal sensor to be integrated without requiring additional external space, maintaining the compact integrated design.
2Reliability
If thermal sensor installation space is provided in the integrated apparatus, then temperature control capability is improved, but device complexity and space utilization are reduced
Solution Approach 1:
The fluid control instrument body itself serves dual purposes: it functions as the fluid control device and simultaneously provides the mounting surface for the thermal sensor through its outer peripheral surface. This self-service approach eliminates the need for separate installation structures, maintaining device simplicity while enabling temperature control.
Solution Approach 2:
The outer peripheral surface of the fluid control instrument body is designed to serve multiple functions: it provides structural support for the instrument and simultaneously serves as the mounting surface for the thermal sensor. This multi-functionality approach adds temperature control capability without increasing device complexity.
3Ease of operation
If thermal sensor is installed using existing fluid control instrument structure, then ease of installation is improved, but additional components and structure are required
Solution Approach 1:
The supporting member is designed with a localized attachment structure that connects to a specific portion of the fluid control instrument body. This localized approach allows easy installation of the thermal sensor without requiring modifications to the entire device structure, balancing ease of installation with minimal added complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the accurate and efficient installation of thermal sensors within the fluid control apparatus, improving temperature control and space utilization without disrupting the apparatus's functionality.
Implementation Method 1
The thermal sensor is, for example, a sensor using a thermal electromotive force (Seebeck effect) generated by a temperature gradient between different types of metals.
Data Source
AI summary
The present invention provides a fluid control apparatus which allows installation of a thermal sensor for temperature control by a simple work by an effective utilization of a space in the fluid control apparatus, and a thermal sensor installation structure with respect to the fluid control apparatus. The fluid control apparatus 1 includes a first fluid control instrument 3 and a second fluid control instrument 4 adjacent to each other and the thermal sensor 17 configured to measure a temperature of a fluid flowing in the first fluid control instrument 3. The fluid control apparatus 1 further includes a supporting member 19 configured to support the thermal sensor 17 attached to the second fluid control instrument 4.