Thermal Heat Sensor Trace for Probe Card Overheating Protection
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Solution Overview
Problem
Existing probe card protection systems are limited in their ability to safeguard large probe arrays from uneven current distribution and overheating, which can lead to damage and costly repairs.
Innovation Solution
A thermal heat sensor trace with conductive metal is integrated into a space transformer on the probe card, forming a resistance that correlates with temperature. A controller monitors the voltage across this resistance and outputs an alert signal if the temperature exceeds a predetermined threshold, triggering measures to reduce the temperature and prevent damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a protection circuit (electronic fuse) is installed to detect and trip the main power rail, then the corresponding probes are protected from overheating and damage, but the protection is limited to only the few corresponding probes connected to the power island and cannot protect a large probe array
Solution Approach 1:
The probe card is divided into multiple thermal zones, each monitored by its own thermal heat sensor trace. This segmentation allows independent temperature monitoring and protection for different regions of the probe array, enabling comprehensive coverage across the entire probe card rather than limiting protection to a single power island's corresponding probes.
Solution Approach 2:
A thermal heat sensor trace is introduced as an intermediary element between the probes and the controller. This trace acts as a mediator that senses temperature conditions and communicates them to the controller, which then activates protection circuits. This intermediary approach enables indirect but comprehensive monitoring of the entire probe array through strategically placed thermal traces.
2Power
If local current clamps of power islands are set to much higher values than the power islands can tolerate, then the power islands can handle higher current loads, but the probes may overheat, melt, recess and burn due to uneven current distribution
Solution Approach 1:
The system implements continuous temperature feedback through thermal heat sensor traces that monitor the actual temperature conditions of the probe card. When the controller detects temperature exceeding predetermined thresholds, it activates protection circuits to trip the main power rail. This feedback mechanism ensures that power levels are dynamically adjusted based on real-time thermal conditions, preventing overheating while allowing high current loads during normal operation.
Solution Approach 2:
Thermal heat sensor traces are pre-installed and positioned in strategic locations on the probe card before operation. These traces are configured to detect temperature rises before they reach dangerous levels. By having the sensing capability in place beforehand, the system can take preliminary protective action by tripping the power rail before actual damage occurs to the probes.
3Adaptability or versatility
If a thermal heat sensor trace is integrated into the space transformer to monitor temperature, then comprehensive protection of the large probe array is achieved, but the device complexity increases
Solution Approach 1:
The thermal heat sensor trace serves multiple functions: it acts as both a structural component of the probe card and a temperature sensing element. The trace is integrated into the space transformer, which already exists as part of the probe card architecture. This multi-functionality approach allows comprehensive temperature monitoring across the probe array without adding separate, dedicated sensing structures, thereby limiting the increase in device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively detects extreme power dissipation in the probe card, preventing damage and reducing the risk of costly repairs and production delays by ensuring even current distribution and maintaining safe operating temperatures.
Implementation Method 1
a thermal heat sensor trace including conductive metal and disposed in a space transformer, the thermal heat sensor trace being configured to form a resistance
Implementation Method 2
a controller configured to sense a voltage across the resistance formed by the thermal heat sensor trace, the voltage positively correlating to a temperature of the space transformer
Data Source
AI summary
An apparatus includes a thermal heat sensor trace including conductive metal and disposed in a space transformer, the thermal heat sensor trace being configured to form a resistance, and a controller configured to sense a voltage across the resistance formed by the thermal heat sensor trace, the voltage positively correlating to a temperature of the space transformer. The controller is further configured to determine whether the sensed voltage is greater than or equal to a predetermined threshold voltage, and based on the sensed voltage being determined to be greater than or equal to the predetermined threshold voltage, output an alert signal for reducing and/or warning of the temperature of the space transformer.