Thermal Spray Ceramic for Cl Plasma Corrosion Resistance
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Solution Overview
Problem
Semiconductor manufacturing apparatuses face corrosion issues due to Cl-based plasma, leading to contamination, and existing materials like SrY2O4 and SrYb2O4 have limitations in corrosion resistance as semiconductors are miniaturized for higher-density integration.
Innovation Solution
A ceramic material with a crystalline phase of a complex oxide containing a Group II element (Sr, Ca, or Ba) and a rare earth element (Y, Er, or Yb) is produced through thermal spraying, which exhibits enhanced corrosion resistance to Cl-based plasma by forming new crystalline phases under ultra-high temperature conditions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If highly corrosion-resistant materials like SrY2O4 or SrYb2O4 are used, then corrosion resistance is improved, but the etching rate becomes lower than Y2O3 and Al2O3
Solution Approach 1:
The invention changes the chemical composition parameters by introducing a complex oxide system with specific M/RE ratio (0.2-0.4) and O/RE ratio (1.8-2.0), deviating from conventional single-phase MRE2O4 materials. This compositional parameter optimization enables simultaneous achievement of high corrosion resistance and maintained etching rate
Solution Approach 2:
The invention creates a composite ceramic material containing multiple crystalline phases including MRE2O4, M2SiO4, and MAlO3 phases. This multi-phase composite structure combines the corrosion resistance of rare earth oxides with the etchability characteristics of silicate and aluminate phases, resolving the contradiction between corrosion resistance and etching rate
2Productivity
If semiconductors are miniaturized for higher-density integration, then device density is improved, but the requirement for corrosion resistance becomes more stringent
Solution Approach 1:
The invention optimizes chemical composition parameters (M/RE ratio: 0.2-0.4, O/RE ratio: 1.8-2.0) to create a material system that provides enhanced corrosion resistance specifically tailored for miniaturized semiconductor applications where material performance margins are reduced
3Productivity
If thermal spraying is used to produce ceramic material, then manufacturing efficiency is improved, but the formation of new crystalline phases under ultra-high temperature may alter material properties
Solution Approach 1:
The invention performs preliminary composition design by carefully selecting raw material ratios (M/RE: 0.2-0.4, O/RE: 1.8-2.0) before thermal spraying, anticipating the phase transformations that will occur under ultra-high temperature. This preliminary optimization ensures that the desired crystalline phases (MRE2O4, M2SiO4, MAlO3) form correctly during the thermal spray process
Solution Approach 2:
The invention utilizes and controls phase transitions during thermal spraying by designing the composition to transform into a specific multi-phase structure under ultra-high temperature conditions. The rapid cooling after thermal spray locks in the desired crystalline phases, converting the potential disadvantage of phase alteration into a controlled process that produces the target material structure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The ceramic material demonstrates improved corrosion resistance to Cl-based plasma, reducing contamination risks and maintaining high performance in semiconductor manufacturing environments.
Implementation Method 1
preparing a material containing MRE2O4 or a material capable of reacting in thermal spray flame to produce MRE2O4 as a thermal spray material, and thermally spraying the thermal spray material onto a predetermined object
Implementation Method 2
M of MRE2O4 is partially volatilized by being exposed to a thermal spraying environment at an ultra-high temperature
Implementation Method 3
melted MRE2O4 having a high-temperature is rapidly cooled
Implementation Method 4
Such a thermodynamically non-equilibrium condition presumably produces a crystalline phase other than MRE2O4
Data Source
AI summary
The ceramic material of the present invention contains a crystalline phase of a complex oxide containing a Group II element M and a rare earth element RE. The Group II element M is Sr, Ca, or Ba. An XRD diagram of the ceramic material shows a first new peak between peaks derived from the (040) plane and the (320) plane of MRE2O4. Such a ceramic material may be manufactured by, for example, preparing a material containing MRE2O4 or a material capable of reacting in thermal spray flame to produce MRE2O4 as a thermal spray material, and thermally spraying the thermal spray material onto a predetermined object.