Thermal-Sprayed Temperature Control Surface for Average Temperature Sensing
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Solution Overview
Problem
Existing temperature measurement methods, such as using sheathed thermocouples or infrared thermometers, often result in inaccurate measurements due to thermal singularities and interference from heat sources, making it difficult to accurately measure the average temperature of a substrate during processes like dry etching.
Innovation Solution
A temperature control unit with a thin coating temperature measuring resistance part, composed of a thermal sprayed coating, is positioned closer to the temperature control object than the temperature control part, allowing for accurate measurement of the average temperature without thermal singularities and interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a sheathed thermocouple is used to measure substrate temperature, then temperature measurement is possible, but thermal singularity occurs at the measurement location causing inaccurate average temperature measurement
Solution Approach 1:
The patent replaces the mechanical contact method (sheathed thermocouple) with a non-contact optical measurement method (radiation thermometer detecting infrared light). This substitution eliminates the thermal singularity caused by physical contact while enabling temperature measurement, directly resolving the contradiction between measurement capability and thermal interference.
Solution Approach 2:
The patent introduces infrared radiation as an intermediary medium to transfer temperature information from the substrate to the measurement device. By detecting the infrared light emitted by the substrate, the radiation thermometer can measure temperature without direct contact, avoiding the thermal singularity problem while maintaining measurement accuracy.
2Measurement precision
If thermocouples are arranged from the back side of the substrate through holes, then temperature measurement is possible, but the distance from the substrate is long causing large difference between measured and actual temperature
Solution Approach 1:
The patent replaces the mechanical insertion method (thermocouples through holes from back side) with optical detection (radiation thermometer measuring infrared light). This eliminates the need for physical penetration and long-distance heat conduction, allowing direct measurement of substrate temperature without the lag and inaccuracy caused by distance.
Solution Approach 2:
The patent extracts the temperature measurement function from the physical substrate structure by using optical detection. Instead of embedding sensors into the substrate through holes, the system measures temperature remotely by detecting infrared radiation, thereby eliminating the distance-related measurement errors.
3Measurement precision
If infrared light radiation is measured with a radiation thermometer, then non-contact temperature measurement is possible, but other heat sources such as plasma light emitting member or halogen heater interfere with temperature measurement
Solution Approach 1:
The patent applies local quality by positioning the radiation thermometer to measure infrared radiation specifically from the substrate surface, while other heat sources (plasma light emitting member, halogen heater) are positioned in regions where their radiation does not reach the detector. This spatial differentiation allows selective measurement of substrate temperature without interference from other heat sources.
Solution Approach 2:
The patent segments the measurement space by positioning the radiation thermometer and substrate in specific geometric relationships, separating the substrate's infrared radiation path from the radiation paths of other heat sources. This spatial segmentation enables the detector to receive signals only from the substrate, excluding interference from plasma or halogen heater radiation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables precise measurement of the average temperature of the temperature control surface, enhancing the accuracy of temperature control by feeding back the measured information for improved control.
Implementation Method 1
a temperature measuring resistor for measuring a temperature of a temperature control object
Implementation Method 2
a thin coating temperature measuring resistance part composed of a thermal sprayed coating which is formed over a certain range in a surface on the side where the temperature control object is located
Data Source
AI summary
A temperature control unit has a temperature control unit body, a temperature control part provided inside the temperature control unit body, which raises and lowers a surface temperature of the temperature control unit body on a side where a temperature control object is located, and a thin coating temperature measuring resistance part composed of a thermal sprayed coating. The thin coating temperature measuring resistance part is formed over a certain range in a surface on the side where the temperature control object is located, and which is provided inside the temperature control unit body on a side closer to the temperature control object than the temperature control part. The thin coating temperature measuring resistance part can accurately measure an average temperature of a temperature control surface.