Thermo-Optic Waveguide Heating With Undercut Thermal Isolation

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Solution Overview

Problem

Existing thermo-optic devices face inefficiencies in heat transfer from heaters to waveguides due to distance and substrate conduction, leading to high power consumption, material degradation, and potential failure.

Innovation Solution

Incorporating a high heat conductance material between the heater and waveguide, and forming an undercut void beneath the heater to reduce thermal resistance and heat loss, along with shaping the power supply connector to minimize overheating.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the heater is positioned at a distance from the waveguide to avoid optical loss and doping, then optical performance is improved, but heat transfer efficiency deteriorates

Engineering Contradiction:
Improveoptical performanceVSAvoidheat transfer efficiency
Core Design Contradiction:
Measurement precisionVSLoss of energy

Solution Approach 1:

A heat transfer material with high heat conductance is introduced as an intermediary layer between the heater and the waveguide. This mediator enables efficient thermal coupling while maintaining the physical separation needed to avoid optical loss and doping issues, thus resolving the contradiction between optical performance and heat transfer efficiency.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Temperature

If the heater operates at relatively high temperature to compensate for heat loss, then heating effectiveness is improved, but power consumption increases and component reliability deteriorates

Engineering Contradiction:
Improveheating effectivenessVSAvoidcomponent reliability
Core Design Contradiction:
TemperatureVSReliability

Solution Approach 1:

The undercut void structure converts the potentially harmful heat loss to the substrate into a beneficial feature by strategically isolating heat flow paths. The void prevents heat from being wasted in unwanted directions while concentrating thermal energy where needed, allowing the heater to operate at lower temperatures with improved reliability.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

3Speed

If the heater operates at high power to compensate for thermal losses, then heating speed is improved, but thermal nonlinearity effects increase and material degradation accelerates

Engineering Contradiction:
Improveheating speedVSAvoidthermal nonlinearity effects
Core Design Contradiction:
SpeedVSObject-generated harmful factors

Solution Approach 1:

The thermal conductivity parameter of the medium between heater and waveguide is changed by introducing a heat transfer material with superior thermal properties. This parameter change enables faster heat transfer at lower power levels, achieving the desired heating speed while avoiding thermal nonlinearity effects and material degradation associated with high-power operation.

Inventive Principle:
Principle #35Parameter changes

4Ease of manufacture

If the tether is designed with standard geometry, then manufacturing simplicity is maintained, but current crowding and overheating occur

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidtether temperature
Core Design Contradiction:
Ease of manufactureVSTemperature

Solution Approach 1:

The tether geometry is modified with localized features such as widened sections or distributed via structures at critical current entry points. These local geometric changes distribute the current density more evenly, preventing current crowding and overheating while maintaining overall manufacturing simplicity through standard fabrication processes.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Improves heat transfer efficiency, reduces power consumption, and decreases the likelihood of component degradation by allowing faster heat dissipation and suppressing thermal nonlinearity effects.

Implementation Method 1

a heat transfer material having relatively high heat conductance may be disposed in the space between the heater and the waveguide. The heat transfer material may improve the efficiency of the heater by reducing the thermal resistance between the heater and the waveguide.

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

thermo-optic phase-shifting devices may heat a waveguide material to change its refractive index

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 3

an undercut void may be formed beneath the heater to reduce heat loss through the substrate

Methodology Applied
Scientific EffectThermal insulation: Thermal Insulation

Data Source

PatentUS12461396B2Heating of thermo-optic device
Publication Date: 2025.11.04 INTEL CORP
  • US12461396B2 patent drawing
  • US12461396B2 patent drawing
  • US12461396B2 patent drawing

AI summary

A method may include: forming a base layer on a substrate; forming a waveguide assembly on the base layer, where the waveguide assembly is surrounded by a cladding layer; forming a trench opening through the cladding layer and the base layer; forming an undercut void by etching the substrate through the trench opening, where the undercut void extends under the waveguide assembly and the base layer; and filling the trench opening with a filler to seal off the undercut void. Other embodiments are described and claimed.