3D Displacement Compensation for Microscopic Thermoreflectance Imaging

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Solution Overview

Problem

Existing microscopic thermoreflectance thermography methods suffer from low work efficiency and inability to perform continuous real-time horizontal displacement compensation and vertical focusing due to sequential execution of sub-pixel image registration and autofocus methods.

Innovation Solution

A three-dimensional displacement compensation method that includes obtaining current and reference images, performing Fourier transforms, determining peak point coordinates and fitting diameters, calculating three-dimensional displacement, and compensating the measured element's position using a control device and displacement platform to simultaneously address horizontal and vertical deviations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If sub-pixel image registration and autofocus are performed sequentially, then measurement precision is maintained, but productivity decreases due to low work efficiency

Engineering Contradiction:
Improvetemperature measurement accuracyVSAvoidwork efficiency
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent combines sub-pixel image registration and autofocus into a single three-dimensional displacement compensation method that processes both horizontal and vertical displacements simultaneously. By merging these two previously sequential operations into one integrated algorithmic framework using Fourier transform and point spread function analysis, the system achieves both horizontal displacement compensation and vertical focusing in parallel, thereby improving productivity while maintaining measurement precision.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent transitions from separate two-dimensional image registration and one-dimensional autofocus operations to a unified three-dimensional displacement compensation approach. By treating horizontal and vertical displacements as components of a single three-dimensional problem and solving them simultaneously through spectral analysis in the frequency domain, the method eliminates the sequential execution bottleneck and achieves real-time compensation in both dimensions.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If sub-pixel image registration and autofocus are performed sequentially, then measurement precision is maintained, but time consumption increases

Engineering Contradiction:
Improvetemperature measurement accuracyVSAvoidtime-consuming displacement compensation
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent merges sub-pixel image registration and autofocus into a single three-dimensional displacement compensation method that processes both horizontal and vertical displacements simultaneously. By merging these two previously sequential operations into one integrated algorithmic framework using Fourier transform and point spread function analysis, the system achieves both horizontal displacement compensation and vertical focusing in parallel, thereby reducing time consumption while maintaining measurement precision.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent enables continuous real-time horizontal displacement compensation and vertical focusing by implementing a unified three-dimensional displacement compensation method. The Fourier transform-based approach allows for continuous processing of displacement information in both horizontal and vertical dimensions simultaneously, eliminating idle time between operations and achieving uninterrupted measurement and compensation throughout the imaging process.

Inventive Principle:
Principle #20Continuity of useful action

3Measurement precision

If position deviation occurs during measurement, then measurement precision deteriorates, but the problem is not adequately solved by sequential compensation methods

Engineering Contradiction:
Improvetemperature measurement accuracyVSAvoidreal-time compensation capability
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent implements a feedback mechanism through the three-dimensional displacement compensation method that continuously monitors position deviations in both horizontal and vertical dimensions and applies real-time corrections. By using Fourier transform to analyze the point spread function and calculate displacement amounts dynamically, the system provides continuous feedback control that maintains measurement precision even when position deviations occur during the measurement process.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent addresses position deviation by transitioning from separate handling of horizontal and vertical displacements to a unified three-dimensional compensation approach. This dimensional integration allows the system to simultaneously correct deviations in both dimensions through a single coordinated process, improving real-time compensation capability while maintaining measurement precision that cannot be achieved through sequential methods.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enables simultaneous calculation and compensation of horizontal and vertical displacements, reducing the time-consuming nature of displacement compensation and facilitating continuous real-time horizontal displacement compensation and vertical focusing.

Implementation Method 1

Thermoreflectance temperature measurement technology is a non-contact temperature measurement technology, which is based on the phenomenon of thermoreflectance whose basic feature is that the reflectivity of an object changes with the temperature of the object.

Methodology Applied
Scientific EffectThermoreflectance: Reflection

Implementation Method 2

performing Fourier transform on a reference image of the measured element to obtain a first result, and performing Fourier transform on the current image of the measured element to obtain a second result

Methodology Applied
Scientific EffectFourier transform:

Data Source

PatentUS12025501B2Three-dimensional displacement compensation method for microscopic thermoreflectance thermography and control device
Publication Date: 2024.07.02 THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
  • US12025501B2 patent drawing
  • US12025501B2 patent drawing
  • US12025501B2 patent drawing

AI summary

A three-dimensional displacement compensation method is provided. The method includes an obtaining step, a transforming step, a first determining step, a first calculating step and a compensating step. The obtaining step includes obtaining a current image of a measured element captured by a microscopic thermoreflectance thermography device. The transforming step includes two sub-steps. One sub-step uses Fourier transform to calculate a reference image to obtain a first result, and the other sub-step uses Fourier transform to calculate the current image to obtain a second result. The first determining step includes determining a peak point coordinate and a fitting diameter of a point spread function of an optical system of the device. The first calculating step includes calculating a three-dimensional displacement of the position to be compensated relative to the reference position. The compensating step compensates the position to be compensated.