Thermosetting Resin Fixing Module for Optical System Alignment
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Solution Overview
Problem
Existing optical systems in semiconductor manufacturing apparatuses face challenges in precise and stable fixation, as current methods require repeated alignment and external fastening forces, which can lead to misalignment and deterioration due to thermal stresses and operational vibrations.
Innovation Solution
A fixing module comprising a coupling unit with a thermosetting resin and two fixing units that secure the optical system at two points, using a thermosetting resin that hardens at room temperature, allowing for precise alignment and secure fixation without external fastening forces, and includes interposers to absorb thermal expansions and deformations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If external fastening forces are used to secure the optical system, then the optical system can be fixed to the apparatus, but misalignment and deterioration occur due to thermal stresses and operational vibrations
Solution Approach 1:
The patent replaces external mechanical fastening forces with a thermosetting resin bonding system. The resin is applied in a liquid state to allow alignment, then hardened to provide secure fixation without the need for bolts or clips that generate thermal stresses and vibrations. This substitution eliminates the harmful mechanical forces while maintaining reliable fixation.
Solution Approach 2:
The patent changes the physical state of the resin from liquid to solid through controlled hardening. In the liquid state, the resin allows movement and alignment of the optical system. After alignment is achieved, the resin is hardened to lock the optical system in place. This parameter change enables both precise alignment and secure fixation without compromising either requirement.
2Manufacturing precision
If the optical system is aligned repeatedly to achieve precise positioning, then alignment accuracy improves, but the alignment time increases
Solution Approach 1:
The patent applies the resin in a liquid state before final alignment is complete, allowing the optical system to be positioned and adjusted while the resin remains fluid. Once alignment is achieved, the resin is hardened to lock the position. This preliminary application of the resin in a flexible state eliminates the need for repeated alignment adjustments, saving time while maintaining precision.
3Productivity
If the thermosetting resin hardens quickly, then fixation speed increases, but the optical system cannot be properly aligned during the hardening process
Solution Approach 1:
The patent controls the hardening parameter of the resin to occur at a specific timing point. The resin is formulated or conditioned to maintain a liquid state during the alignment phase, then undergoes hardening only after alignment is complete. This controlled parameter change ensures both adequate alignment time and efficient fixation speed without compromising either requirement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides stable and precise fixation of optical systems, preventing misalignment and deterioration by using a thermosetting resin that hardens at room temperature, securing the optical system at two points, and absorbing thermal stresses, thereby enhancing installation accuracy and reducing operational costs.
Implementation Method 1
a receiving space including a thermosetting resin such that the protruding portion is fixed into the thermosetting resin
Implementation Method 2
a room temperature thermosetting resin which hardens at room temperature
Implementation Method 3
at least one interposer between the first and the second clamps, the at least one interposer transferring a relative deformation of the fixing module to the flexible portion of the first clamp, to protect the optical system from stress caused by the relative deformation
Data Source
AI summary
Disclosed is a fixing module for fixing an optical system to an optical apparatus, including a coupling unit having a plate to couple to the apparatus, the coupling unit having a first penetrating space at a central portion thereof and a protruding portion protruded downwards from the plate; a first fixing unit combinable with the coupling unit and having a receiving space including a thermosetting resin such that the protruding portion is fixed into the thermosetting resin; and a second fixing unit combinable with the first fixing unit and having a second penetrating space communicating with the first penetrating space, such that the optical system can penetrate through the first and the second penetrating spaces and be fixed by the second fixing unit.