Electromagnetic Thickness Measurement Through Reflective Chambers

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Solution Overview

Problem

Existing thickness measuring devices cannot accurately measure the thickness of specimens protected by chambers due to interference from the chamber's reflections and superposition effects, which complicates the measurement process in high-density and miniaturization technologies like semiconductors and displays.

Innovation Solution

A thickness measuring device that uses electromagnetic waves to calculate the specimen's thickness by analyzing the time difference between peak reflections from the specimen's surfaces, minimizing interference from the chamber's reflections and superposition effects, and employing a control unit to process signals from the receiving unit for precise measurements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a chamber is used to protect the specimen from external foreign matter, then the specimen is protected, but the thickness measurement becomes impossible due to chamber interference

Engineering Contradiction:

Improvespecimen protectionVSAvoidthickness measurement

Core Design Contradiction:

ReliabilityVSMeasurement precision

Solution Approach 1:

The patent uses electromagnetic waves as an intermediary to penetrate the chamber and measure the specimen thickness non-contactly. The electromagnetic wave passes through the chamber without being affected by it, enabling measurement while the specimen remains protected inside the chamber.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces contact-based mechanical measurement methods with electromagnetic wave-based non-contact measurement. This substitution allows measurement through the chamber without physical contact, eliminating chamber interference while maintaining specimen protection.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Measurement precision

If electromagnetic waves are used to measure thickness through the chamber, then non-contact measurement is enabled, but superposition effects from multiple reflections complicate the measurement

Engineering Contradiction:

Improvethickness measurementVSAvoidsignal processing complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The patent converts the harmful superposition effect of multiple reflections into a useful signal pattern. By analyzing the time differences between successive reflected waves, the system extracts thickness information from what would otherwise be interfering signals.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The patent uses the reflected electromagnetic waves as feedback signals to calculate thickness. The time delay between transmitted and reflected waves provides direct feedback about the specimen thickness, enabling precise measurement through signal analysis.

Inventive Principle:

Principle #23Feedback

3Productivity

If the measurement process is simplified, then measurement time is reduced, but accuracy may be compromised due to chamber interference

Engineering Contradiction:

Improvemeasurement speedVSAvoidthickness measurement accuracy

Core Design Contradiction:

ProductivityVSMeasurement precision

Solution Approach 1:

The patent performs preliminary calibration by measuring the chamber's reflection characteristics before specimen measurement. This preliminary action allows the system to compensate for chamber effects during actual measurement, maintaining accuracy while enabling rapid measurement.

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables non-destructive, accurate, and convenient thickness measurement of specimens even when protected by chambers, reducing measurement time and improving uniformity assessment, with the option to determine refractive indices and thickness using transmission and reflection time differences.

Implementation Method 1

a receiving unit which receives an electromagnetic wave output in a direction in which the chamber is positioned

Methodology Applied

Scientific EffectElectromagnetic wave reflection: Reflection

Implementation Method 2

calculates a thickness of the specimen using peak time points of measured electromagnetic waves

Methodology Applied

Scientific EffectTime of flight: Time of Flight

Data Source

PatentUS12055378B2Thickness measuring device

Publication Date: 2024.08.06 ACTRO CO LTD

AI summary

A thickness measuring device of the present invention includes a supporter which supports a specimen, an emission unit which emits an electromagnetic wave in a direction toward the specimen, a chamber which surrounds the specimen, a receiving unit which receives an electromagnetic wave output in a direction in which the chamber is positioned, and a control unit which receives a signal from the receiving unit and calculates a thickness of the specimen. At least a part of the chamber transmits a part of the electromagnetic wave and reflects the remaining part of the electromagnetic wave. The receiving unit receives a first electromagnetic wave having a first peak and a second electromagnetic wave having a second peak. The first peak occurs at a first time point, the second peak occurs at a second time point, and a difference between the first time point and the second time point is a first period or more.