Thin-Film Capacitance Sensor Array for Plastic Substrate Contour Detection
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Solution Overview
Problem
Existing electrostatic capacitance detection devices on single-crystal silicon substrates are inflexible and difficult to fabricate on plastic substrates, and thin-film semiconductor devices struggle to accurately read minute charges due to inferior transistor characteristics and larger variation among devices.
Innovation Solution
An electrostatic capacitance detection device with thin-film semiconductor devices arranged in rows and columns, utilizing signal detection, row selection, column selection, and signal amplification elements, where the on-resistance of selection elements is set to be smaller than the signal amplification element, and a reference capacitor is used to enhance signal amplification and reduce detection sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If thin-film semiconductor devices are used to fabricate electrostatic capacitance detection devices on plastic substrates, then flexibility and ease of manufacture are improved, but measurement precision deteriorates due to inferior transistor characteristics and larger device variation
Solution Approach 1:
The patent divides the detection device into multiple independent detection elements arranged in rows and columns, with each element containing its own signal detection, row selection, column selection, and signal amplification components. This segmentation allows each element to operate independently, reducing the impact of device variation on overall measurement precision while maintaining the flexibility of thin-film fabrication on plastic substrates.
Solution Approach 2:
The patent introduces a reference capacitor as an intermediary component that compensates for variations in transistor characteristics. The reference capacitor provides a stable reference value that allows the detection element to accurately measure changes in electrostatic capacitance despite variations in the thin-film transistor parameters, thereby maintaining measurement precision while using flexible thin-film semiconductor devices.
2Reliability
If conventional series-coupled capacitors are used for electrostatic capacitance detection, then detection capability is achieved, but device complexity increases and manufacturing precision requirements become more stringent
Solution Approach 1:
The patent segments the detection function into multiple independent detection elements, each with its own simplified capacitor configuration. This segmentation reduces the complexity of each individual element while maintaining overall detection capability through the array of elements, making the device more manufacturable while preserving reliability.
Solution Approach 2:
The patent uses multiple identical detection elements arranged in rows and columns, where each element is a copy of the same basic design. This copying approach simplifies manufacturing by using standardized components while maintaining detection capability through the collective operation of multiple elements, reducing the complexity requirements for each individual element.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device achieves accurate detection of surface contours with improved stability and reduced manufacturing energy and labor, enabling reliable operation on substrates other than single-crystal silicon, while maintaining high sensitivity and precision.
Implementation Method 1
detecting electrostatic capacitance, which changes according to the distance from the surface of the target object
Implementation Method 2
a signal amplification element amplifying a signal corresponding to the charge stored in the signal detection element
Implementation Method 3
The signal detection element includes a capacitance detection electrode and a reference capacitor
Data Source
AI summary
An electrostatic capacitance detection device, for detecting electrostatic capacitance that changes in accordance with a distance from a target object to read surface contours of the target object, can sense electrostatic capacitance highly accurately even with using thin-film semiconductor devices. The electrostatic capacitance detection device includes electrostatic capacitance detection elements arranged in M rows and N columns, a power supply line that supplies power to the electrostatic capacitance detection elements, an output line that outputs a signal from the electrostatic capacitance detection elements, M row lines that select the electrostatic capacitance detection elements disposed on a specific row, and N column lines that select the electrostatic capacitance detection elements disposed on a specific column. Further, the electrostatic capacitance detection elements each include a signal detection element, a row selection element, a column selection element, and a signal amplification element.