Thin-Film Strain Sensor Crack Control Using Stress Concentration Structures

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Solution Overview

Problem

Existing strain sensors face challenges in achieving high sensitivity in a wide range of tensile environments, with deposited metal thin-film sensors being limited and conductive nanomaterial-based sensors showing low sensitivity.

Innovation Solution

A method of manufacturing a strain sensor by controlling thin-film cracks using a stress concentration structure, involving the formation of micro notches on a flexible substrate and depositing a conductive thin-film to overlap the structure, allowing control of crack growth and resistance changes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a deposited metal thin-film is used for the strain sensor, then high sensitivity is achieved due to greater change in resistance for small deformation, but the sensor can only be used in a very limited tensile environment

Engineering Contradiction:
ImprovesensitivityVSAvoidtensile environment range
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The patent introduces stress concentration structures (micro notches) that segment the continuous thin-film into controlled crack zones. These segmented crack patterns allow the film to accommodate tensile deformation while maintaining resistance change sensitivity, thus resolving the contradiction between high sensitivity and limited tensile environment range.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent applies local quality by creating specific stress concentration structures (micro notches) at predetermined locations rather than uniform deformation. This localized stress concentration enables controlled crack formation in specific regions, allowing the sensor to maintain high sensitivity while adapting to various tensile environments through programmed crack patterns.

Inventive Principle:
Principle #3Local quality

2Adaptability or versatility

If a conductive nanomaterial with good mechanical properties is used for the strain sensor, then it can operate in a wide range of tensile environments, but there is low sensitivity due to insignificant change in resistance

Engineering Contradiction:
Improvetensile environment rangeVSAvoidsensitivity
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The patent applies preliminary action by pre-forming stress concentration structures (micro notches) in the thin-film before the sensor is subjected to tensile load. These pre-formed structures guide where cracks will form under stress, ensuring that even materials with good mechanical properties will produce measurable resistance changes, thus improving sensitivity without sacrificing tensile environment adaptability.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent changes the structural parameters of the thin-film by introducing stress concentration structures with specific geometries and spacing. This parameter modification transforms the uniform material into a structured system that produces significant resistance changes under tension, resolving the low sensitivity issue while maintaining wide tensile environment operation.

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If micro notches are formed closer together to control crack growth, then crack length is reduced and conduction path is blocked more effectively, but the manufacturing complexity increases

Engineering Contradiction:
Improveresistance change controlVSAvoidstress concentration structure arrangement
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent uses copying by replicating identical micro notch patterns across the substrate using standardized design units. This approach allows precise control of crack growth and resistance changes while simplifying manufacturing, as the same pattern can be repeatedly copied rather than creating unique complex structures for each sensor region.

Inventive Principle:
Principle #26Copying

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The sensor achieves high sensitivity in both low and high tensile environments, enabling applications in flexible and stretchable devices, such as healthcare monitoring and human-machine interfaces, by controlling crack growth and resistance through stress concentration structures.

Implementation Method 1

forming a stress concentration structure on the flexible substrate by repeatedly depositing a micro notch (MN), which is formed to have a structure having a boundary in a two-dimensional plane (xy plane) or a three-dimensional structure having a boundary in a direction perpendicular to the plane (z direction)

Methodology Applied
Scientific EffectStress concentration:

Implementation Method 2

a resistance-based sensor has been widely developed, generally using a property of increase in resistance of a metal conductor due to external deformation

Methodology Applied
Scientific EffectPiezoresistive effect: Piezoresistive Effect

Data Source

PatentUS12624938B2Method for manufacturing strain sensor by control of thin-film crack using stress concentration structure and strain sensor manufactured using same
Publication Date: 2026.05.12 SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION
  • US12624938B2 patent drawing
  • US12624938B2 patent drawing
  • US12624938B2 patent drawing

AI summary

A method for manufacturing a strain sensor comprises the steps of: preparing a solution to be used as a conductive thin-film material and a flexible substrate; forming, on the flexible substrate, a stress concentration structure by repeatedly depositing a micro notch formed to have a structure having a boundary on a two-dimensional plane (the xy plane) or have a three-dimensional structure having a boundary in a direction perpendicular to the plane (the z direction); and forming a strain sensor by depositing a conductive thin film on the flexible substrate in such a way that the conductive thin film overlaps at least a portion of the stress concentration structure. Accordingly, the stress concentration structure can be manufactured at a desired location through patterning, and can be applied for various purposes by controlling the sensitivity and linearity by adjusting the arrangement of the structure and the thickness of the conductive thin film.