Thin-Film Six-Axis Force Sensor With Low Coupling Stability
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Solution Overview
Problem
Traditional multi-dimensional force sensors face issues of performance degradation due to glue volatilization, moisture absorption, and temperature dependence, which affect their stability and accuracy.
Innovation Solution
A combined six-dimensional force sensor using thin-film sputtering technology to sputter strain gauges, featuring a detachable structure with flat surfaces for strain gauge application and a rectangular beam design for high sensitivity, reducing inter-dimensional coupling and improving stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If traditional strain gauges are pasted using glue, then the sensor can be manufactured with simple processes, but the sensor suffers from glue volatilization, moisture absorption, and temperature dependence leading to performance degradation
Solution Approach 1:
The patent replaces the traditional mechanical gluing process with thin-film sputtering technology. The strain gauges are no longer pasted using adhesive but are directly deposited as thin films onto the cross beam structure through vacuum sputtering, eliminating glue-related issues while maintaining manufacturing feasibility
Solution Approach 2:
The patent changes the fundamental parameter of strain gauge attachment from chemical bonding (glue) to physical deposition (sputtering). This parameter change transforms the attachment mechanism from adhesive-based to vacuum-deposition-based, resolving the contradiction between manufacturing simplicity and long-term stability
2Reliability
If thin-film sputtering technology is used to sputter strain gauges, then sensor stability and resistance to heat and humidity are improved, but the manufacturing process becomes more complex
Solution Approach 1:
The patent merges the strain gauge fabrication and attachment processes into a single thin-film sputtering step. The strain gauges are patterned and deposited directly onto the cross beam in one continuous vacuum process, eliminating separate gluing and curing steps, thus reducing overall process complexity despite the advanced sputtering technology
3Measurement precision
If a integrated cross beam structure is used, then the sensor achieves high measurement precision, but the processing and assembly becomes more difficult
Solution Approach 1:
The patent segments the sensor into modular components: a pre-fabricated cross beam with integrated strain gauges, a force transmission table, and a housing assembly. The cross beam with strain gauges can be manufactured and tested separately, then assembled with other components, making processing and assembly easier while maintaining measurement precision
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sensor achieves high sensitivity and stability by minimizing inter-dimensional coupling and resistance to heat and humidity, enhancing measurement accuracy and sensitivity.
Implementation Method 1
a combined six-dimensional force sensor based on thin-film sputtering technology
Implementation Method 2
24 strain gauges are sputtered on the cross beam and the force transmission table to form six sets of Wheatstone bridges
Data Source
AI summary
A combined six-dimensional force sensor based on thin-film sputtering technology includes a force transmission table, a cross beam, a base, a top cover, a bottom cover and strain gauges. Strain gauges are sputtered on the elastomer structure to form six sets of Wheatstone bridges. The measurement method of the six-dimensional force sensor is that: an input force/moment of a certain dimension acts on the elastomer structure including the force transmission table and the cross beam through the top cover, the cross beam is deformed and resistance values of strain gauges at corresponding positions change, and output voltages of corresponding bridges change.