Thin Film Deposition Light Control for Uniform Heating
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Solution Overview
Problem
Existing thin film deposition processes face challenges in achieving uniform thickness and temperature control across a substrate, leading to non-uniform thin film formation.
Innovation Solution
The apparatus incorporates a light controlling unit with a blocking part that adjusts the light irradiation area, using a core portion and a coating layer to block light, ensuring uniform temperature distribution and thickness across the substrate by controlling the light irradiation path.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If light irradiation is applied to heat the substrate for thin film deposition, then the deposition speed is improved, but the temperature uniformity across the substrate deteriorates
Solution Approach 1:
The light controlling unit creates non-uniform light distribution by blocking specific regions, ensuring that areas receiving more light are compensated by blocking, thereby achieving uniform temperature distribution across the substrate while maintaining high deposition speed through selective light irradiation
2Manufacturing precision
If the light irradiation area is increased to improve deposition uniformity, then the temperature uniformity is improved, but the energy consumption increases
Solution Approach 1:
The system dynamically adjusts light irradiation parameters by selectively blocking light in specific regions through the light controlling unit, achieving uniform thin film deposition while optimizing energy consumption by preventing over-irradiation in certain areas
3Measurement precision
If a light controlling unit is added to block light and control irradiation area, then the temperature control precision is improved, but the device complexity increases
Solution Approach 1:
The light controlling unit serves as an intermediary component between the light source and substrate, using simple blocking structures to achieve precise temperature control without requiring complex control systems or multiple components
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively reduces thickness deviations in thin film formation, achieving uniform epitaxial layer growth across the substrate by uniformly controlling the substrate temperature.
Implementation Method 1
a light source unit disposed in the reflection housing and irradiating light to the susceptor
Implementation Method 2
the coating layer may be a reflection layer
Data Source
AI summary
An apparatus is provided for depositing a thin film. The apparatus includes a chamber, a susceptor disposed in the chamber and supporting a substrate, a reflection housing disposed outside the chamber, a light source unit disposed in the reflection housing and irradiating light to the susceptor, and a light controlling unit blocking at least a portion of an irradiation path of the light to control an irradiation area of the light on the susceptor. At least a portion of the light controlling unit is disposed in the reflection housing.