Thin Film Solid State Battery Dry Sputtering Process
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Solution Overview
Problem
Existing thin film solid state lithium ion batteries face challenges in reducing size and thickness while maintaining stability and durability, particularly due to issues with moisture sensitivity and the need for high-temperature processing, which limits manufacturing yield and practicality.
Innovation Solution
A thin film solid state lithium ion battery structure that includes an electric insulating substrate, a cathode-side current collector film, a cathode active material film, a solid electrolyte film, and an anode potential formation layer, where the anode potential formation layer is formed from a material different from the anode active material to facilitate charge and discharge in air, and is manufactured without post-annealing, using a dry process to prevent moisture-related deterioration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If high-temperature post-annealing is used to crystallize the cathode active material film, then the battery achieves stable driving characteristics, but the manufacturing cost increases and manufacturing yield decreases due to moisture-related deterioration
Solution Approach 1:
The cathode active material film is formed with crystalline structure in advance during the sputtering process by controlling the substrate temperature to 150°C or higher, eliminating the need for subsequent post-annealing treatment. This preliminary crystallization prevents moisture-related deterioration that would occur during later high-temperature processing steps.
Solution Approach 2:
The substrate temperature during film formation is changed to 150°C or higher, which enables in-situ crystallization of the cathode active material film during sputtering. This parameter change allows the film to achieve stable driving characteristics without requiring separate high-temperature post-annealing processes that would compromise manufacturing yield.
2Length of stationary object
If thin substrate or thin solid electrolyte film is used, then the battery thickness is reduced, but the manufacturing precision requirements increase
Solution Approach 1:
The patent replaces mechanical post-processing methods with a controlled sputtering process that forms films with precise thickness control during deposition. By controlling the sputtering conditions including substrate temperature and deposition parameters, the system achieves the required manufacturing precision for thin films without additional mechanical processing steps.
3Productivity
If dry process is used to form all layers, then moisture-related deterioration is prevented and manufacturing yield improves, but the complexity of process control increases
Solution Approach 1:
The patent combines multiple film formation steps into a single continuous sputtering process performed in a dry environment. By merging the formation of the cathode current collector film, cathode active material film, and solid electrolyte film into one integrated process, the system prevents moisture-related deterioration while managing process control complexity through unified parameter optimization.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The battery achieves stable driving and improved charge and discharge characteristics, with enhanced durability and manufacturing yield, allowing for the use of amorphous films and reducing the need for expensive high-temperature processing.
Implementation Method 1
a cathode-side current collector film, a cathode active material film, a solid electrolyte film, and an anode potential formation layer are formed on a substrate by a sputtering method
Data Source
AI summary
In one embodiment, a thin film solid state lithium ion secondary battery is able to be charged and discharged in the air and is able to be manufactured stably at a favorable yield. The thin film solid state lithium ion secondary battery has an electric insulating substrate formed from an organic resin, an inorganic insulating film provided on the substrate face, a cathode-side current collector film, a cathode active material film, a solid electrolyte film, an anode potential formation layer, and an anode-side current collector film. The cathode-side current collector film and/or the anode-side current collector film is formed on the inorganic insulating film face. The anode potential formation layer is a layer formed from the same material as that of the cathode active material film or a material different from that of the cathode active material film and is a layer provided for forming anode potential at the time of discharge.